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US 12,638,485 B2Granted
System and method for non-invasive sensing of radio-frequency current spectra flowing in a plasma processing chamber
AssigneeApplied Materials, Inc.
InventorsDavid Gahan, Paul Scullin
Life of this patent
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Abstract
A system for non-invasive sensing of radio-frequency current spectra. In one example, the system comprises a plasma processing chamber, a plasma generator, and a shunt connector having a resistor therein. In one example, the shunt connector is attached across an opening in a ground-return path between the chamber and the generator.
Claims16
A system for non-Invasive sensing of radio-frequency current spectra comprising:
- a plasma processing chamber;
- a plasma generator;
- a shunt connector having a resistor therein, the shunt connector bridging an opening in a ground-return path between the chamber and the generator;
- and
- an amplifier configured to detect the voltage drop generated by the resistor and output an RF signal.
2 more elements
A method for non-Invasive sensing of radio-frequency current spectra flowing in a plasma processing chamber comprising:
- providing a shunt connector having a resistor therein;
- and
- attaching the shunt connector across an opening in a ground-return path between the chamber and a plasma generator;
- and
- coupling an amplifier to the shunt connector to detect the voltage drop generated by the resistor and output an RF signal.
2 more elements
Dependencies are inferred from the claim text.