Plasma probe device and plasma processing apparatus
AssigneeTokyo Electron Limited
InventorsYuji SAWADA, Mitsutoshi ASHIDA, Kenta KATO
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Abstract
A plasma probe device, which is provided in a member exposed to an internal space of a processing container in which plasma is generated, includes a probe cover including a tubular metal cover and a tubular insulating cover provided inside the tubular metal cover, a rod-shaped probe body provided inside the tubular insulating cover, and a metal plate connected to a tip end of the rod-shaped probe body and configured to cover a tip end of the probe cover. A discharge port, through which a gas is supplied to a space between the metal plate and the tip end of the probe cover, is provided near the rod-shaped probe body rather than a peripheral edge of the probe cover.
Claims8
A plasma probe device provided in a member exposed to an internal space of a processing container in which plasma is generated, the plasma probe device comprising:
- a probe cover including a tubular metal cover and a tubular insulating cover provided inside the tubular metal cover;
- a rod-shaped probe body provided inside the tubular insulating cover;
- and
- a metal plate connected to a tip end of the rod-shaped probe body and configured to cover a tip end of the probe cover,
- wherein a discharge port through which a gas is supplied to a space between the metal plate and the tip end of the probe cover is provided near the rod-shaped probe body rather than a peripheral edge of the probe cover.
Dependencies are inferred from the claim text.