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US 8,289,029 B2Granted
Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
AssigneeMKS Instruments, Inc.
InventorDavid J. Coumou
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Abstract
An arc detection system for a plasma generation system includes a radio frequency (RF) sensor that generates first and second signals based on a respective electrical properties of (RF) power that is in communication with a plasma chamber. A correlation module generates an arc detect signal based on the first and second signals. The arc detect signal indicates whether an arc is occurring in the plasma chamber and is employed to vary an aspect of the RF power to extinguish the arc.
Claims24
An arc detection system for a plasma generation system, comprising:
- a radio frequency (RF) sensor that generates first and second signals based on a respective electrical properties of RF power that is in communication with a plasma chamber;
- and
- an analysis module that generates an arc detect signal based on cross-correlating the first and second signals, wherein the arc detect signal indicates whether an arc is occurring in the plasma chamber and is employed to vary an aspect of the RF power to extinguish the arc, and that determines an estimated energy of the arc based on a correlation of the first and second signals.
An arc detection method for a plasma generation system, comprising:
- generating first and second signals based on respective electrical properties of radio frequency (RF) power that is in communication with a plasma chamber;
- generating an arc detect signal based on the first and second signals, wherein the arc detect signal indicates whether an arc is occurring in the plasma chamber;
- employing the arc detect signal to vary an aspect of the RF power to extinguish the arc;
- and
- generating an estimated energy of the arc based on a cross-correlation of the first and second signals.
2 more elements
Dependencies are inferred from the claim text.