G01Q 60/46
Scm [scanning capacitance microscopy] or apparatus therefor
Official title: SCM [Scanning Capacitance Microscopy] or apparatus therefor, e.g. SCM probes
G01Q60/46 (Scm [scanning capacitance microscopy] or apparatus therefor) appears on 33 US grants and 33 published applications in this corpus.
Search patents in G01Q- Granted patents
- 33
- Published applications
- 33
- Assignees
- 30
- Inventors
- 72
- Latest grant
- 14 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 2 | 2 |
| 2003 | 1 | 2 |
| 2004 | 3 | 3 |
| 2005 | 3 | 3 |
| 2006 | 1 | 2 |
| 2007 | 2 | 3 |
| 2008 | 1 | 0 |
| 2009 | 0 | 1 |
| 2010 | 4 | 2 |
| 2011 | 0 | 0 |
| 2012 | 1 | 0 |
| 2013 | 0 | 0 |
| 2014 | 1 | 2 |
| 2015 | 1 | 3 |
| 2016 | 2 | 1 |
| 2017 | 2 | 2 |
| 2018 | 1 | 0 |
| 2019 | 0 | 0 |
| 2020 | 0 | 1 |
| 2021 | 1 | 1 |
| 2022 | 0 | 1 |
| 2023 | 2 | 1 |
| 2024 | 0 | 2 |
| 2025 | 0 | 1 |
| 2026 | 2 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Method for obtaining the dielectric constant of a dielectric sheet14 Jul 2026US 12,681,064 B2Msscorps Co., Ltd.
- Method for obtaining the equivalent oxide thickness of a dielectric layer26 May 2026US 12,638,472 B2Msscorps Co., Ltd.
- Atomic force microscopy apparatus, methods, and applications7 Nov 2023US 11,808,783 B2Cornell University
- Method of preparing a specimen for scanning capacitance microscopy4 Apr 2023US 11,619,650 B1Msscorps Co., Ltd.
- Atomic force microscopy apparatus, methods, and applications16 Nov 2021US 11,175,306 B2Cornell University
- Method for obtaining the dielectric constant of a dielectric sheet6 Nov 2025US 2025/0341555 A1Msscorps Co., Ltd.
- Method for obtaining the equivalent oxide thickness of a dielectric layer11 Jul 2024US 2024/0230710 A9Msscorps Co., Ltd.
- Method for obtaining the equivalent oxide thickness of a dielectric layer25 Apr 2024US 2024/0133918 A1Msscorps Co., Ltd.
- Method of preparing a specimen for scanning capacitance microscopy30 Mar 2023US 2023/0098264 A1Msscorps Co., Ltd.
- Atomic force microscopy apparatus, methods, and applications10 Feb 2022US 2022/0043024 A1Cornell University
Most cited
By later US patents
- Scanning capacitance - voltage microscopy73US 5,065,103 AInternational Business Machines Corporation · 1991
- Scanning capacitance microscope39US 4,481,616 ARCA Corporation · 1984
- Junction profiling using a scanning voltage micrograph37US 6,395,437 B1Advanced Micro Devices, Inc. · 2002
- Scanning microwave microscope capable of realizing high resolution and microwave resonator37US 6,614,227 B2NEC Corporation · 2003
- Scanning probe microscope and method for obtaining topographic image, surface potential image, and electrostatic capacitance distribution image18US 5,742,172 ASeiko Instruments Inc. · 1998