Scanning microwave microscope capable of realizing high resolution and microwave resonator

A microwave microscope comprising:

• a microwave resonator comprising
• a line section and
• a probe provided in said line section,
• said probe comprising a sharp conductive end,
• for scanning a sample,
• a first detecting unit for detecting a first detection amount relating to a resonant state of said microwave resonator;
• a distance changing unit for causing a differential change in a distance between said sharp end and said sample;
• a second detecting unit for detecting a second detection amount relating to a change of said first detection amount;
• and
• a control unit for controlling the distance between said sharp end and said sample in accordance with said second detection amount, so that an average value of the distance between said sharp end and said sample is brought close to a definite value.

A scanning microwave microscope comprising:

• a microwave resonator comprising
• a line section, and
• a replaceable probe provided in said line section,
• said probe comprising a sharp conductive end for scanning a sample,
• a first detecting unit for detecting a first detection amount relating to a resonant state of said microwave resonator;
• a distance changing unit for causing a differential change in a distance between said sharp end and said sample;
• a second detecting unit for detecting a second detection amount relating to a change of said first detection amount;
• and
• a control unit for controlling the distance between said sharp end and said sample in accordance with said second detection amount, so that an average value of the distance between said sharp end and said sample is brought close to a definite value.