G01N 2223/507
Secondary-emission detector
Official title: secondary-emission detector
G01N2223/507 (Secondary-emission detector) appears on 99 US grants and 120 published applications in this corpus.
Search patents in G01N- Granted patents
- 99
- Published applications
- 120
- Assignees
- 82
- Inventors
- 357
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2013 | 0 | 2 |
| 2014 | 1 | 1 |
| 2015 | 1 | 0 |
| 2016 | 1 | 1 |
| 2017 | 0 | 1 |
| 2018 | 0 | 1 |
| 2019 | 4 | 3 |
| 2020 | 2 | 6 |
| 2021 | 6 | 38 |
| 2022 | 23 | 27 |
| 2023 | 19 | 20 |
| 2024 | 20 | 10 |
| 2025 | 17 | 6 |
| 2026 | 5 | 4 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Apparatus for analyzing composition and method thereof6 Oct 2026US 12,754,152 B23I Solution Inc.
- Manufacturing of test structures using e-beam lithography for use in characterization and quality control of metrology tools used in semiconductor manufacturing5 May 2026US 12,619,163 B1Corporation for National Research Initiatives
- Systems and methods for signal electron detection17 Feb 2026US 12,555,738 B2ASML Netherlands B. V.
- Inspection tool, inspection tool operating method, and non-transitory computer readable medium10 Feb 2026US 12,546,731 B1ASML Netherlands B. V.
- Enhanced architecture for high-performance detection device13 Jan 2026US 12,525,426 B2ASML Netherlands B. V.
- Dynamic switching of a detector switch matrix3 Sep 2026US 2026/0259156 A1ASML Netherlands B. V.
- Analysis device20 Aug 2026US 2026/0243663 A1Keyence Corporation
- Diversifying sem measurement scheme for improved accuracy6 Aug 2026US 2026/0227350 A1ASML Netherlands B. V.
- Dual charged particle and energy-dispersive spectroscopy imaging using a diamond membrane14 May 2026US 2026/0133148 A1
- Inspection device, inspection element, and inspection method17 Jul 2025US 2025/0231124 A1Hitachi High-Tech Corporation
Most cited
By later US patents
- Detector modules for imaging systems and methods of manufacturing12US 8,824,635 B2General Electric Company · 2014
- Conical collimator for X-ray measurements11US 10,393,683 B2Malvern Panalytical Limited · 2019
- Systems, devices, and methods for x-ray fluorescence analysis of geological samples5US 11,592,407 B2Enersoft Inc. · 2023
- Apparatus, detector, and method for applying a pixel by pixel bias on demand in energy discriminating computed tomography (CT) imaging5US 9,101,273 B2Kabushiki Kaisha Toshiba · 2015
- X-ray detector monitoring device3US 10,837,925 B1Shimadzu Corporation · 2020