Dual charged particle and energy-dispersive spectroscopy imaging using a diamond membrane

Abstract

A device, apparatus, and method for simultaneous imaging in charged particle microscopy. The method also includes directing, by a charged particle beam source, a charged particle beam towards a target, where interactions of the charged particle beam with the target generate charged particle emissions and electromagnetic emissions. The method also includes receiving, by a membrane detector, the charged particle emissions and the electromagnetic emissions, where the membrane detector at least partially absorbs a portion of the charged particle emissions and is at least partially transparent to the electromagnetic emissions. The method also includes outputting, by the membrane detector, charged particle signal data based at least in part on the portion of the charged particle emissions received by the membrane detector. The method also includes outputting, by an electromagnetic emission detector, electromagnetic signal data based at least in part on the electromagnetic emissions that pass through the membrane detector.

Dependencies are inferred from the claim text.