X-ray detector monitoring device

Abstract

An X-ray detector monitoring device capable of detecting a time when an X-ray detector is disabled due to a slow leak is provided. The X-ray detector monitoring device is provided with an X-ray detection element 32 for detecting X-ray intensity, an X-ray detector 30 having a vacuum insulation container 33 in which an X-ray introduction window 31 is formed, a cooling means 60 for cooling the X-ray detection element 32, a detection element temperature sensor 81 mounted on the X-ray detection element 32 to output detection element temperature information Tt by detecting a temperature of an X-ray detection element 32, and a control unit 40 and 70 configured to calculate an output value for controlling the cooling means 60 to output the output value to the cooling means 60 so that the detection element temperature information Tt becomes a preset temperature TS. The control unit 40 and 70 is configured to detect a vacuum state of the vacuum insulation container 33 based on the output value.

Dependencies are inferred from the claim text.