G01N 2201/1053
System of scan mirrors for composite motion of beam
G01N2201/1053 (System of scan mirrors for composite motion of beam) appears on 30 US grants and 33 published applications in this corpus.
Search patents in G01N- Granted patents
- 30
- Published applications
- 33
- Assignees
- 34
- Inventors
- 101
- Latest grant
- 4 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 1 |
| 2006 | 0 | 0 |
| 2007 | 1 | 2 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 2 |
| 2011 | 0 | 1 |
| 2012 | 1 | 0 |
| 2013 | 0 | 0 |
| 2014 | 1 | 0 |
| 2015 | 2 | 3 |
| 2016 | 3 | 4 |
| 2017 | 2 | 3 |
| 2018 | 0 | 2 |
| 2019 | 1 | 4 |
| 2020 | 2 | 2 |
| 2021 | 5 | 0 |
| 2022 | 0 | 3 |
| 2023 | 3 | 0 |
| 2024 | 1 | 4 |
| 2025 | 1 | 1 |
| 2026 | 2 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Apparatus and method for measuring wafers4 Aug 2026US 12,699,058 B2Precitec Optronik GmbH
- Panel inspection device having first, second and third mirrors, and method for inspecting a panel6 Jan 2026US 12,517,337 B2Excelitas Deutschland GmbH
- Wafer defect inspection system23 Dec 2025US 12,504,384 B2Syntec Resources Co., Ltd.
- Digital mirror device based code-division multiplexed Raman optical mapping system for wide field imaging10 Dec 2024US 12,163,891 B2CytoVeris, Inc.
- Line scanning mechanical streak systems and methods for phosphorescence lifetime imaging14 Nov 2023US 11,815,456 B2Purdue Research Foundation
- Inspection device for side surface of cylindrical battery23 Apr 2026US 2026/0110643 A1Enscape Co., Ltd.
- Wafer defect inspection system6 Feb 2025US 2025/0044241 A1Syntec Resources Co., Ltd.
- Apparatus and method for measuring wafers28 Nov 2024US 2024/0393261 A1Precitec Optronik GmbH
- Device for inspecting lateral surface of cylindrical battery31 Oct 2024US 2024/0361252 A1LG Energy Solution, Ltd.
- Laser scanning imaging method and system, storage medium, and computer program13 Jun 2024US 2024/0188825 A1Suzhou Microview Medical Technologies Co., Ltd.
Most cited
By later US patents
- Non-ionizing imager92US 9,084,535 B2King's College London · 2015
- Foreign particle detecting method and apparatus52US 4,669,875 AHitachi, Ltd. · 1987
- Photothermal test process, apparatus for performing the process and heat microscope34US 5,118,945 ASiemens Aktiengesellschaft · 1992
- Three dimensional scanning system29US 5,276,546 A1994
- 3D profile analysis for surface contour inspection23US 6,366,689 B1Asti Corporation · 2002