Panel inspection device having first, second and third mirrors, and method for inspecting a panel
AssigneeExcelitas Deutschland GmbH
InventorAchim Zirkel
Life of this patent
Estimating the term…
Abstract
An inspection device for inspecting a panel, in particular a display, or a PCB, includes a first mirror, a second mirror, a third mirror, and a sensor. The first mirror, the second mirror, and the third mirror are arranged to display a section of the panel to be inspected on the sensor with a magnification factor greater than one. At least two of the group of the first mirror, the second mirror, and the third mirror, have both a first type of curvature, and a remaining mirror has a second type of curvature, opposite to the first type of curvature. The first mirror, the second mirror, and the third mirror form a telecentric system which is telecentric on a panel facing side and/or on a sensor facing side.
Claims16
An inspection device for inspecting a panel, comprising:
- a first mirror, a second mirror, a third mirror, and a sensor, wherein the first mirror, the second mirror, and the third mirror are arranged to display a section of the panel to be inspected on the sensor with a magnification factor M, where M>1, and wherein at least two of the group of the first mirror, the second mirror, and the third mirror, have both a first type of curvature, and a remaining mirror has a second type of curvature, opposite to the first type of curvature,
- and the first mirror, the second mirror, and the third mirror form a telecentric system which is telecentric on a panel facing side and/or on a sensor facing side, wherein:
- a first vertex of the first mirror, a second vertex of the second mirror, and a third vertex of the third mirror, all lie on a common optical axis;
- a first aperture of the first mirror, and a third aperture of the third mirror are decentered relative to the common optical axis;
- and
- a second aperture of the second mirror remains symmetric, and non-decentered about the common optical axis.
A method of inspecting a panel, comprising the steps of:
- providing a first mirror, a second mirror, a third mirror, and a sensor, wherein the first mirror, the second mirror, and the third mirror have a combined magnification factor M greater than one and are arranged to convey an image of a section of the panel to be inspected on the sensor, and wherein at least two of the group of the first mirror, the second mirror, and the third mirror, have both a first type of curvature, and the remaining mirror has a second type of curvature, opposite to the first type of curvature;
- capturing the image of the section of the panel with the sensor;
- and
- visually displaying the section of the panel on the sensor with a magnification factor M greater than one, wherein:
- a first vertex of the first mirror, a second vertex of the second mirror, and a third vertex of the third mirror, all lie on a common optical axis;
- a first aperture of the first mirror, and a third aperture of the third mirror are decentered relative to the common optical axis;
- and
- a second aperture of the second mirror remains symmetric, and non-decentered about the common optical axis.
Dependencies are inferred from the claim text.