G01N 2021/8835
Adjustable illumination
Official title: {Adjustable illumination, e.g. software adjustable screen}
G01N2021/8835 (Adjustable illumination) appears on 142 US grants and 184 published applications in this corpus.
Search patents in G01N- Granted patents
- 142
- Published applications
- 184
- Assignees
- 151
- Inventors
- 487
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 3 |
| 2003 | 3 | 0 |
| 2004 | 1 | 3 |
| 2005 | 1 | 1 |
| 2006 | 2 | 5 |
| 2007 | 0 | 2 |
| 2008 | 3 | 3 |
| 2009 | 4 | 5 |
| 2010 | 2 | 2 |
| 2011 | 1 | 1 |
| 2012 | 4 | 1 |
| 2013 | 2 | 6 |
| 2014 | 3 | 4 |
| 2015 | 4 | 3 |
| 2016 | 3 | 3 |
| 2017 | 3 | 10 |
| 2018 | 3 | 9 |
| 2019 | 17 | 19 |
| 2020 | 15 | 14 |
| 2021 | 8 | 8 |
| 2022 | 9 | 9 |
| 2023 | 9 | 14 |
| 2024 | 7 | 24 |
| 2025 | 21 | 19 |
| 2026 | 14 | 16 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Optical inspection method, non-transitory storage medium, and optical inspection apparatus18 Aug 2026US 12,710,356 B2Kabushiki Kaisha Toshiba
- Apparatus and method for measuring wafers4 Aug 2026US 12,699,058 B2Precitec Optronik GmbH
- Light source apparatus, inspection apparatus, exposure apparatus, light source control method, inspection method, and exposure method28 Jul 2026US 12,693,232 B2Lasertec Corporation
- Adaptation of illumination settings for optical measurement and inspection systems28 Jul 2026US 12,693,239 B2Hexagon Innovation Hub GmbH
- Method and apparatus for characterization of a microlithography mask28 Jul 2026US 12,693,594 B2Carl Zeiss SMT GmbH
- Multiple Azimuth, Multiple Pass Optical Measurements Of Semiconductor Structures1 Oct 2026US 2026/0298807 A1
- Shape inspection method for inspection-target object24 Sep 2026US 2026/0287336 A1Mitsubishi Electric Corporation
- Exterior inspection device and inspection light control method24 Sep 2026US 2026/0287514 A1Sony Honda Mobility Inc.
- Inspection optical apparatus, defect inspection apparatus, irradiation optical system, and inspection method24 Sep 2026US 2026/0287517 A1Nikon Corporation
- Optical inspection apparatus, optical inspection system, optical inspection method, and non-transitory storage medium storing optical inspection program10 Sep 2026US 2026/0266734 A1Kabushiki Kaisha Toshiba
Most cited
By later US patents
- Video inspection system employing multiple spectrum LED illumination99US 5,365,084 APressco Technology Inc. · 1994
- Systems and/or devices for camera-based inspections86US 8,374,498 B2Microscan Systems, Inc. · 2013
- Engineered lighting system for TDI inspection comprising means for controlling lighting elements in accordance with specimen displacement84US 5,172,005 APressco Technology Inc. · 1992
- Apparatus and method for characterizing defects in a transparent substrate84US 7,567,344 B2Corning Incorporated · 2009
- Method and apparatus for auto-adjusting illumination40US 7,557,920 B22009