Optical inspection method, non-transitory storage medium, and optical inspection apparatus

A non-transitory storage medium storing an optical inspection program configured to cause a computer to execute:

• causing a wavelength selection portion to selectively pass light components including at least two different wavelength spectra from an object point and causing an imaging portion including at least two color channels configured to receive the light components of the wavelength spectra to capture the object point;
• defining the light components of the at least two different wavelength spectra as signal vectors having different directions based on light reception data in the at least two color channels for the object point;
• and
• estimating spread of a direction distribution of light at the object point based on the directions of the signal vectors,
• wherein:
• the wavelength selection portion includes:
• a first set in which a plurality of wavelength selection regions different from each other are arranged;
• and
• a second set in which the plurality of wavelength selection regions are arranged in the same array as the first set, and
• the wavelength selection portion introduces a periodic background noise component into a captured image.

An optical inspection apparatus comprising one or more processors configured to

• cause a wavelength selection portion to selectively pass light components including at least two different wavelength spectra from an object point and cause an imaging portion including at least two color channels configured to receive the light components of the wavelength spectra to capture the object point;
• define the light components of the at least two different wavelength spectra as signal vectors having different directions based on light reception data in the at least two color channels for the object point;
• and
• estimate spread of a direction distribution of light at the object point based on the directions of the signal vectors,
• wherein:
• the wavelength selection portion includes:
• a first set in which a plurality of wavelength selection regions different from each other are arranged;
• and
• a second set in which the plurality of wavelength selection regions are arranged in the same array as the first set, and
• the wavelength selection portion introduces a periodic background noise component into a captured image.