Shape inspection method for inspection-target object

A shape inspection method for an inspection-target object, using a shape inspection apparatus for the inspection-target object, the shape inspection apparatus comprising:

• a camera which is provided movably relative to the inspection-target object and takes an image of the inspection-target object;
• an adjustment mechanism for adjusting a distance between the camera and the inspection-target object;
• an illumination device which has a light source for emitting light to the inspection-target object and is capable of changing a position of the light source;
• a controller which controls operation of the adjustment mechanism and controls position change operation of the light source of the illumination device, light-up operation thereof, change operation of a spectrum distribution thereof, and operation for the camera to take an image of the inspection-target object;
• and
• a computer which outputs an operation command to the controller for commanding operation of changing positions of the camera and the light source relative to the inspection-target object, light-up operation of the light source, operation of changing the spectrum distribution of the light source, and operation for the camera to take an image of the inspection-target object, and controls the controller, comprising at least one processor and at least one memory, wherein
• while the position of the camera is moved and an irradiation position of light from the light source to the inspection-target object is changed, an image of the inspection-target object is taken, and on the basis of the taken image, a shape of the inspection-target object is estimated and compared with a shape of an inspection-target object as a reference measured in advance, by the computer, to determine a three-dimensional shape of the inspection-target object, and
• in the shape inspection method,
• with respect to the inspection-target object, while a position of the illumination device is changed, for each of the changed position, from a plane position of the inspection-target object when the inspection-target object is projected on a plane perpendicular to an optical axis of the camera, an angle shape of the inspection-target object calculated from an angular position of the illumination device when regular reflection light from the inspection-target object enters the camera, and a top height of the inspection-target object calculated from an image taken at an in-focus position when the camera is moved in an optical-axis direction of the camera relative to the inspection-target object, the three-dimensional shape of the inspection-target object is calculated, and a shape of the inspection-target object is determined.

A shape inspection method for an inspection-target object, using a shape inspection apparatus for the inspection-target object, the shape inspection apparatus comprising:

• a camera which is provided movably relative to the inspection-target object and takes an image of the inspection-target object;
• an adjustment mechanism for adjusting a distance between the camera and the inspection-target object;
• a grid projection illumination device which has a light source for emitting light to the inspection-target object and is capable of changing a position of the light source, and which projects a grid formed of parallel lines at regular intervals;
• a controller which controls operation of the adjustment mechanism and controls position change operation of the light source of the illumination device, light-up operation thereof, change operation of a spectrum distribution thereof, and operation for the camera to take an image of the inspection-target object;
• and
• a computer which outputs an operation command for commanding operation of changing positions of the camera and the light source relative to the inspection-target object, light-up operation of the light source, operation of changing the spectrum distribution of the light source, and operation for the camera to take an image of the inspection-target object, and controls the controller, comprising at least one processor and at least one memory, wherein
• while the position of the camera is moved and an irradiation position of light from the light source to the inspection-target object is changed, an image of the inspection-target object is taken, and on the basis of the taken image, a shape of the inspection-target object is estimated and compared with a shape of an inspection-target object as a reference measured in advance, by the computer, to determine a three-dimensional shape of the inspection-target object, and
• in the shape inspection method,
• on the basis of an angle shape of the inspection-target object and a grid interval measured by, with the camera, taking an image of a grid pattern projected on the inspection-target object, which is obtained when the inspection-target object is irradiated by the grid projection illumination device, the three-dimensional shape of the inspection-target object is measured and whether or not a shape of the inspection-target object is proper is determined.