G01N 2021/214
Variangle incidence arrangement
Official title: {Variangle incidence arrangement}
G01N2021/214 (Variangle incidence arrangement) appears on 46 US grants and 42 published applications in this corpus.
Search patents in G01N- Granted patents
- 46
- Published applications
- 42
- Assignees
- 30
- Inventors
- 111
- Latest grant
- 4 Nov 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2001 | 2 | 0 |
| 2002 | 0 | 1 |
| 2003 | 0 | 1 |
| 2004 | 2 | 2 |
| 2005 | 2 | 1 |
| 2006 | 1 | 1 |
| 2007 | 2 | 2 |
| 2008 | 1 | 1 |
| 2009 | 3 | 2 |
| 2010 | 3 | 2 |
| 2011 | 2 | 2 |
| 2012 | 2 | 1 |
| 2013 | 4 | 2 |
| 2014 | 0 | 2 |
| 2015 | 4 | 4 |
| 2016 | 2 | 2 |
| 2017 | 2 | 2 |
| 2018 | 1 | 0 |
| 2019 | 4 | 1 |
| 2020 | 0 | 1 |
| 2021 | 0 | 2 |
| 2022 | 2 | 2 |
| 2023 | 2 | 2 |
| 2024 | 2 | 4 |
| 2025 | 3 | 0 |
| 2026 | 0 | 2 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Devices and methods for determining polarization characteristics from partial polarimetry4 Nov 2025US 12,460,973 B2Arizona Board of Regents on Behalf of the University of Arizona
- Mueller matrix ellipsometer8 Jul 2025US 12,352,687 B2Government of the United States of America, AS Represented By the Secretary of Commerce
- Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method18 Feb 2025US 12,228,499 B2Samsung Electronics Co., Ltd.
- Polarization analysis apparatus and method for adjusting angle of incidence or numerical aperture using aperture20 Aug 2024US 12,066,331 B2Auros Technology, Inc.
- Method for determining properties of a sample by ellipsometry16 Apr 2024US 11,959,852 B2Park Systems Corp.
- Simultaneous multi-wavelength and multi-angle ellipsometry25 Jun 2026US 2026/0177475 A1Onto Innovation Inc.
- Rapid ellipsometry using encoded angular distribution of light23 Apr 2026US 2026/0110625 A1Onto Innovation Inc.
- Determining and reconstructing a shape and a material property of an object7 Nov 2024US 2024/0369352 A1Meta Platforms Technologies, LLC
- Devices and methods for determining polarization characteristics from partial polarimetry18 Jul 2024US 2024/0240986 A1Arizona Board of Regents on Behalf of the University of Arizona
- Apparatus, Optical system, and Method for digital holographic and polarization microscopy7 Mar 2024US 2024/0077711 A1
Most cited
By later US patents
- Differential numerical aperture methods75US 7,053,991 B2Accent Optical Technologies, Inc. · 2006
- Differential numerical aperture methods and device23US 6,750,968 B2Accent Optical Technologies, Inc. · 2004
- Micropolarimeter and ellipsometer22US 6,275,291 B1Nanophotonics AG · 2001
- Method and device for three-dimensionally determining the refractive index of transparent or partially transparent layers21US 7,612,879 B2Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e. V. · 2009
- Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems18US 6,859,278 B1J. A. Woollam Co. Inc. · 2005