Simultaneous multi-wavelength and multi-angle ellipsometry

A metrology device configured for angle resolved, multiple wavelength ellipsometry, comprising:

• a light source that generates light with multiple wavelengths;
• a means for modulating each wavelength with a different characteristic;
• an objective lens that focuses the light on a sample over a range of incident angles;
• a photodetector array having a plurality of pixels that detects reflected light from the sample, wherein different pixels in the plurality of pixels detect reflected light that corresponds to different incident angles and that includes all of the multiple wavelengths;
• and
• a means for demodulating a signal produced by each pixel in the plurality of pixels in the photodetector array for each different characteristic to produce ellipsometric measurements for multiple incident angles at the multiple wavelengths.