Polarization analysis apparatus and method for adjusting angle of incidence or numerical aperture using aperture
AssigneeAuros Technology, Inc.
InventorsMi Ta Park, Jae Jun Lee
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Abstract
There is provided a polarization analysis apparatus that adjusts an angle of incidence or a numerical aperture by using an aperture. The apparatus includes: a first aperture that transmits a lighting beam reflected from a sample on a substrate; a second aperture that transmits a lighting beam having passed through the first aperture; and a detector that detects a lighting beam having passed through the second aperture and selects an angle of incidence of the lighting beam and numerical apertures of the first aperture and the second aperture.
Claims13
A polarization analysis apparatus that adjusts an angle of incidence or a numerical aperture by using an aperture, comprising:
- a first aperture that operates in a first direction perpendicular to a beam direction in which a lighting beam proceeds and transmits the lighting beam reflected from a sample on a substrate, wherein the first aperture comprises a plurality of circular plates, and each of the circular plates has a hole that is formed in a direction parallel with the first direction, transmits the lighting beam and controls an angle of incidence of the lighting beam;
- a second aperture that operates in a second direction perpendicular to the first direction and the beam direction and that transmits the lighting beam having passed through a circulate plate-shaped hole which is included in the first aperture, wherein the second aperture comprises a plurality of slits having different sizes, and the slits are arranged in a line along a direction parallel with the second direction and adjust a numerical aperture of the lighting beam;
- and
- a detector that detects the lighting beam having passed through the second aperture.
A method in which a polarization analysis apparatus adjusts an angle of incidence or a numerical aperture by using an aperture, comprising:
- a first step of operating in a first direction perpendicular to a beam direction in which a lighting beam proceeds and transmitting the lighting beam reflected from a sample on a substrate, by a first aperture;
- a second step of operating in a second direction perpendicular the first direction and the beam direction and transmitting the lighting beam having passed through a circular plate-shaped hole which is included in the first aperture, by a second aperture;
- and
- a third step of detecting the lighting beam having passed through the second aperture, by a detector,
- wherein the first aperture comprises a plurality of circular plates, and each of the circular plates has a hole that is formed in a direction parallel with the first direction, transmits the lighting beam and controls an angle of incidence of the lighting beam, and
- the second aperture comprises a plurality of slits having different sizes, and the slits are arranged in a line along a direction parallel with the second direction and adjust a numerical aperture of the lighting beam.
Dependencies are inferred from the claim text.