G01L 21/16
Vacuum gauges: by measuring variation of frictional resistance of gases
Official title: by measuring variation of frictional resistance of gases
G01L21/16 (Vacuum gauges: by measuring variation of frictional resistance of gases) appears on 31 US grants and 21 published applications in this corpus.
Search patents in G01L- Granted patents
- 31
- Published applications
- 21
- Assignees
- 29
- Inventors
- 68
- Latest grant
- 18 Jul 2023
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1983 | 2 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 2 | 0 |
| 1991 | 4 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 1 |
| 2005 | 0 | 1 |
| 2006 | 2 | 0 |
| 2007 | 0 | 1 |
| 2008 | 0 | 1 |
| 2009 | 0 | 0 |
| 2010 | 1 | 3 |
| 2011 | 0 | 1 |
| 2012 | 2 | 0 |
| 2013 | 1 | 2 |
| 2014 | 4 | 2 |
| 2015 | 0 | 2 |
| 2016 | 0 | 0 |
| 2017 | 2 | 1 |
| 2018 | 1 | 0 |
| 2019 | 0 | 1 |
| 2020 | 0 | 0 |
| 2021 | 0 | 1 |
| 2022 | 2 | 1 |
| 2023 | 1 | 1 |
| 2024 | 0 | 0 |
| 2025 | 0 | 0 |
| 2026 | 0 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Wide range highly sensitive pressure sensor based on heated micromachined arch beam18 Jul 2023US 11,703,406 B2King Abdullah University of Science and Technology
- Optomechanical pressure measurement system and method using the vibrational modes of a membrane29 Mar 2022US 11,287,334 B1Government of the USA, as represented by the Secretary of Commerce, National Institute of Standards and Technology
- Electromechanical pressure sensor15 Mar 2022US 11,274,983 B2King Abdullah University of Science and Technology
- Vacuum apparatus and method of monitoring particles20 Feb 2018US 9,897,526 B2Samsung Display Co., Ltd.
- Lithography apparatus with segmented mirror19 Dec 2017US 9,846,375 B2Carl Zeiss SMT GmbH
- Ion source26 Feb 2026US 2026/0058092 A1
- Vacuum insulated panel configured for measurement of pressure in evacuated gap29 Jan 2026US 2026/0028872 A1LuxWall, Inc.
- Sensor device and method for detecting the internal pressure and/or a change in the internal pressure in a gas-tight internal volume of a housing component23 Nov 2023US 2023/0375424 A1
- Wide range highly sensitive pressure sensor based on heated micromachined arch beam26 May 2022US 2022/0163418 A1King Abdullah University of Science and Technology
- Electromechanical pressure sensor13 May 2021US 2021/0140841 A1King Abdullah University of Science and Technology
Most cited
By later US patents
- MEMS capacitive pressure sensor65US 9,772,245 B2ams International AG · 2017
- Gas pressure gauge and pressure measuring method24US 4,995,264 ABalzers Aktiengesellschaft · 1991
- Quartz crystal pressure sensor20US 5,136,885 ATIF Instruments, Inc. · 1992
- Tuning fork quartz manometer19US 4,995,263 ABalzers Aktiengesellschaft · 1991
- Micromechanical pressure gauge having extended sensor range19US 5,528,939 A1996