Sensor device and method for detecting the internal pressure and/or a change in the internal pressure in a gas-tight internal volume of a housing component

A sensor device, comprising:

• a housing component with a gas-tight internal volume configured therein;
• at least one electrode structure disposed in the internal volume in an adjustable and/or bendable manner;
• at least one counter electrode fixedly disposed on and/or in the housing component;
• and
• an electronic device configured to apply at least one electrical excitation voltage signal between the at least one adjustable and/or bendable electrode structure and at least one of the at least one counter electrode such that the at least one electrode structure is set in an oscillating motion relative to the housing component;
• wherein the electronic device is configured to detect and/or determine an internal pressure in the internal volume and/or a change in the internal pressure while taking into account at least one sensor signal which is dependent on an electrical voltage or capacitance between the at least one adjustable and/or bendable electrode structure and the at least one of the at least one counter electrode.

A method for producing a sensor device, comprising the following steps:

• forming at least one electrode structure of the sensor device, the at least one electrode structure being disposed in an adjustable and/or bendable manner in an internal volume of a housing component of the sensor device;
• forming at least one counter electrode of the sensor device, the at least one counter electrode being fixedly disposed on and/or in the housing component;
• closing off the internal volume in a gas-tight manner;
• and
• forming an electronic device of the sensor device, the electronic device being configured to apply at least one electrical excitation voltage signal between the at least one adjustable or bendable electrode structure and at least one of the at least one counter electrode such that the at least one electrode structure is set in an oscillating motion relative to the housing component,
• wherein the electronic device is additionally configured to detect or determine an internal pressure in the internal volume and/or a change in the internal pressure, while taking into account at least one sensor signal which is dependent on an electrical voltage or capacitance between the at least one adjustable and/or bendable electrode structure and the at least one of the at least one counter electrode.