G01L 21/00
Vacuum gauges
G01L21/00 (Vacuum gauges) appears on 349 US grants and 303 published applications in this corpus.
Search patents in G01L- Granted patents
- 349
- Published applications
- 303
- Assignees
- 208
- Inventors
- 666
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 2 | 0 |
| 1981 | 3 | 0 |
| 1982 | 1 | 0 |
| 1983 | 3 | 0 |
| 1984 | 3 | 0 |
| 1985 | 3 | 0 |
| 1986 | 4 | 0 |
| 1987 | 5 | 0 |
| 1988 | 5 | 0 |
| 1989 | 5 | 0 |
| 1990 | 4 | 0 |
| 1991 | 6 | 0 |
| 1992 | 5 | 0 |
| 1993 | 2 | 0 |
| 1994 | 7 | 0 |
| 1995 | 3 | 0 |
| 1996 | 6 | 0 |
| 1997 | 4 | 0 |
| 1998 | 3 | 0 |
| 1999 | 7 | 0 |
| 2000 | 3 | 0 |
| 2001 | 3 | 3 |
| 2002 | 5 | 4 |
| 2003 | 6 | 5 |
| 2004 | 8 | 10 |
| 2005 | 7 | 10 |
| 2006 | 8 | 10 |
| 2007 | 9 | 11 |
| 2008 | 14 | 10 |
| 2009 | 4 | 6 |
| 2010 | 10 | 17 |
| 2011 | 5 | 13 |
| 2012 | 11 | 8 |
| 2013 | 9 | 5 |
| 2014 | 13 | 16 |
| 2015 | 8 | 21 |
| 2016 | 7 | 16 |
| 2017 | 19 | 20 |
| 2018 | 15 | 16 |
| 2019 | 16 | 14 |
| 2020 | 18 | 9 |
| 2021 | 12 | 15 |
| 2022 | 11 | 15 |
| 2023 | 13 | 17 |
| 2024 | 14 | 14 |
| 2025 | 9 | 6 |
| 2026 | 7 | 12 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- G01L 21/30Vacuum gauges: by making use of ionisation effects149
- G01L 21/10Vacuum gauges: by measuring variations in the heat conductivity of the medium122
- G01L 21/16Vacuum gauges: by measuring variation of frictional resistance of gases31
- G01L 21/02Vacuum gauges: having a compression chamber in which gas, whose pressure is10
- G01L 21/08Vacuum gauges: by measuring variations in the transmission of acoustic waves through3
- G01L 21/26Vacuum gauges: by making use of radiometer action, i.e. of the pressure1
Recent patents
- Gas leak detection device and gas leak detection method for identifying a gas leak in a test object6 Oct 2026US 12,754,095 B2Inficon GmbH
- Method for determining a measure of a rate of decay and mass spectrometry system6 Oct 2026US 12,755,948 B2Thermo Fisher Scientific (Bremen) GmbH
- Photonically multiplexed optical measurement apparatus and performing optical multiplexing28 Jul 2026US 12,695,001 B2Government of the United States of America, AS Represented By the Secretary of Commerce
- Optical fiber pressure sensor using thermal pressure sensing9 Jun 2026US 12,650,352 B2Centre National De La Recherche Scientifique
- Electrical, mechanical, computing, and/or other devices formed of extremely low resistance materials24 Mar 2026US 12,588,427 B2Ambature, Inc.
- Electrical, Mechanical, Computing and/or Other Devices Formed of Extremely Low Resistance Materials13 Aug 2026US 2026/0239890 A1Ambature, Inc.
- Electrical, Mechanical, Computing and/or Other Devices Formed of High Temperature Superconducting Materials13 Aug 2026US 2026/0239891 A1Ambature, Inc.
- Robot control apparatus and robot system6 Aug 2026US 2026/0225230 A1Fanuc Corporation
- Apparatus and method for inspecting stacking equipment6 Aug 2026US 2026/0228878 A1Samsung SDI.Co., Ltd.
- Vacuum pumps with internal oil test11 Jun 2026US 2026/0160244 A1
Most cited
By later US patents
- Thermocouple vacuum gauge370US 8,047,711 B2Heinz Ploechinger · 2011
- Microscopic size, thermal conductivity type, air or gas absolute pressure sensor77US 4,682,503 AHoneywell Inc. · 1987
- Pressure transducer assembly77US 6,553,841 B1Helix Technology Corporation · 2003
- MEMS capacitive pressure sensor65US 9,772,245 B2ams International AG · 2017
- Cold cathode gauge fast response signal circuit53US 8,928,329 B2MKS Instruments, Inc. · 2015