G01L 21/02
Vacuum gauges: having a compression chamber in which gas, whose pressure is
Official title: having a compression chamber in which gas, whose pressure is to be measured, is compressed
G01L21/02 (Vacuum gauges: having a compression chamber in which gas, whose pressure is) appears on 10 US grants and 12 published applications in this corpus.
Search patents in G01L- Granted patents
- 10
- Published applications
- 12
- Assignees
- 12
- Inventors
- 37
- Latest grant
- 17 Jan 2023
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
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| 1987 | 0 | 0 |
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| 1989 | 0 | 0 |
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| 1991 | 0 | 0 |
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| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
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| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
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| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 1 |
| 2012 | 0 | 2 |
| 2013 | 0 | 0 |
| 2014 | 1 | 0 |
| 2015 | 2 | 0 |
| 2016 | 0 | 2 |
| 2017 | 0 | 0 |
| 2018 | 2 | 2 |
| 2019 | 0 | 1 |
| 2020 | 0 | 0 |
| 2021 | 1 | 2 |
| 2022 | 0 | 0 |
| 2023 | 1 | 2 |
By publication year. Applications have been published since 2001.
Subgroups
Granted patents
Recent patents
- Method of calibrating multiple chamber pressure sensors17 Jan 2023US 11,555,755 B2Tokyo Electron Limited
- Substrate position calibration for substrate supports in substrate processing systems14 Dec 2021US 11,201,078 B2APPLIED Materials.Inc.
- Method and process for determining gas content using transient pressure analysis23 Oct 2018US 10,107,703 B2Inficon GmbH
- Method of and apparatus for measuring vacuum pressure29 May 2018US 9,983,085 B2Inficon GmbH
- Respiratory condition analysis apparatus, respiratory condition display apparatus, processing method therein, and program18 Aug 2015US 9,109,971 B2Sony Corporation
- Realization of the pascal from the boltzmann constant using mass comparison of artifacts in vacuum and gas9 Nov 2023US 2023/0358628 A1
- Method for controlling the radiotherapy treatment of cancer patients and related control device2 Feb 2023US 2023/0037123 A1S.I.T. - Sordina IORT Technologies S.p.A.
- Method of calibrating multiple chamber pressure sensors30 Sep 2021US 2021/0302257 A1Tokyo Electron Limited
- Monitoring device for a vacuum-insulated system6 May 2021US 2021/0131908 A1
- Vacuum measuring device20 Jun 2019US 2019/0187018 A1Beijing Chuangyu Technology Co., Ltd
Most cited
By later US patents
- Electrostatically-actuated structures for fluid property measurements and related methods39US 5,955,659 AMassachusetts Institute of Technology · 1999
- Wide range vacuum gauge8US 5,452,613 AGranville-Phillips Company · 1995
- Substrate position calibration for substrate supports in substrate processing systems1US 11,201,078 B2APPLIED Materials.Inc. · 2021
- Pressure gauge1US 4,218,927 AGilmont Instruments, Inc. · 1980
- Masker sound generation apparatus and program1US 8,861,742 B2Yamaha Corporation · 2014