Vacuum measuring device
AssigneeBeijing Chuangyu Technology Co., Ltd
InventorsQingsong ZHAO, Jianhui NAN
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Abstract
Embodiments of the present disclosure relate to a technical field of vacuum gauges, and more particularly to a vacuum measuring device. The vacuum measuring device includes a pre-stage chamber and a vacuum gauge provided in sequence along a pressure conduction direction. The pre-stage chamber is communicated with the vacuum gauge. A pre-stage diaphragm is provided in the pre-stage chamber. A measurement diaphragm is provided in the vacuum gauge. A pressure conduction chamber is formed between the pre-stage diaphragm and the measurement diaphragm. The pressure conduction chamber is filled with a pressure conduction fluid.
Claims12
A vacuum measuring device, comprising a pre-stage chamber and a vacuum gauge provided in sequence along a pressure conduction direction, wherein the pre-stage chamber is communicated with the vacuum gauge;
- a pre-stage diaphragm is provided in the pre-stage chamber;
- a measurement diaphragm is provided in the vacuum gauge;
- a pressure conduction chamber is formed between the pre-stage diaphragm and the measurement diaphragm;
- and the pressure conduction chamber is filled with a pressure conduction fluid.
Dependencies are inferred from the claim text.