Electrostatically-actuated structures for fluid property measurements and related methods

A method of measuring a property of a fluid, said method comprising the steps of:

• providing a substrate including a first electrode;
• providing a flexible member adjacent said substrate and said first electrode wherein said flexible member includes a second electrode and wherein the fluid is adjacent said flexible member;
• generating a predetermined electrical signal across said first and second electrodes so that an electrostatic force is generated between said first and second electrodes and so that said flexible member deflects a predetermined distance wherein an interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance is dependent on a property of a fluid adjacent said flexible member;
• measuring the interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance;
• and
• determining the property of the fluid adjacent said flexible member based on said interval of time.

A method of forming a fluid property sensor, said method comprising the steps of:

• forming a substrate including a first electrode;
• forming a flexible member adjacent said substrate and said first electrode wherein said flexible member includes a second electrode adjacent said first electrode;
• providing a signal generator which generates a predetermined electrical signal across said first and second electrodes so that an electrostatic force is generated between said first and second electrodes and so that said flexible member deflects a predetermined distance wherein an interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance is dependent on a property of a fluid adjacent said flexible member;
• and
• providing a measuring circuit which measures the interval of time between the generation of said predetermined electrical signal and the deflection of said flexible member to said predetermined distance, and which determines the property of the fluid adjacent said flexible member based on said interval of time.

A fluid property sensor comprising:

• a flexible member adjacent a substrate;
• generator means for generating a force so that said flexible member deflects a predetermined distance wherein an interval of time between the generation of said force and the deflection of said flexible member to said predetermined distance is dependent on a property of a fluid adjacent said flexible member;
• and
• a measuring means for measuring the interval of time between the generation of said force and the deflection of said flexible member to said predetermined distance and for determining the property of the fluid adjacent said flexible member based on said interval of time.

A method of measuring a property of a fluid using a sensor including a substrate and a flexible member adjacent the substrate, wherein the fluid is adjacent the flexible member, said method comprising the steps of:

• applying a force to said flexible member so that said flexible member deflects a predetermined distance wherein an interval of time between the application of said force and the deflection of said flexible member to said predetermined distance is dependent on a property of a fluid adjacent said flexible member;
• measuring the interval of time between the application of said force and the deflection of said flexible member to said predetermined distance;
• and
• determining the property of the fluid adjacent said flexible member based on said interval of time.

A fluid property sensor comprising:

• a flexible member adjacent a substrate;
• an actuator which applies a predetermined force to said flexible member so that said flexible member deflects a predetermined distance wherein an interval of time between the application of said force to said flexible member and the deflection of said flexible member to said predetermined distance is dependent on a property of a fluid adjacent said flexible member;
• and
• a measuring circuit which measures the interval of time between the application of said force to said flexible member and the deflection of said flexible member to said predetermined distance and for determining the property of the fluid adjacent said flexible member based on said interval of time.