G01L 21/30
Vacuum gauges: by making use of ionisation effects
Official title: by making use of ionisation effects
G01L21/30 (Vacuum gauges: by making use of ionisation effects) appears on 149 US grants and 108 published applications in this corpus.
Search patents in G01L- Granted patents
- 149
- Published applications
- 108
- Assignees
- 89
- Inventors
- 261
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 3 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 3 | 0 |
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 2 | 0 |
| 1988 | 3 | 0 |
| 1989 | 3 | 0 |
| 1990 | 2 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 2 | 0 |
| 1994 | 5 | 0 |
| 1995 | 1 | 0 |
| 1996 | 3 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 2 | 1 |
| 2002 | 3 | 2 |
| 2003 | 3 | 2 |
| 2004 | 3 | 3 |
| 2005 | 2 | 5 |
| 2006 | 4 | 5 |
| 2007 | 3 | 3 |
| 2008 | 5 | 4 |
| 2009 | 2 | 4 |
| 2010 | 6 | 7 |
| 2011 | 2 | 5 |
| 2012 | 6 | 4 |
| 2013 | 3 | 1 |
| 2014 | 5 | 6 |
| 2015 | 4 | 8 |
| 2016 | 4 | 9 |
| 2017 | 9 | 9 |
| 2018 | 8 | 5 |
| 2019 | 7 | 5 |
| 2020 | 5 | 3 |
| 2021 | 8 | 4 |
| 2022 | 4 | 3 |
| 2023 | 2 | 5 |
| 2024 | 4 | 3 |
| 2025 | 3 | 1 |
| 2026 | 2 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Method for determining a measure of a rate of decay and mass spectrometry system6 Oct 2026US 12,755,948 B2Thermo Fisher Scientific (Bremen) GmbH
- Operating method for a group of pressure sensors17 Feb 2026US 12,553,786 B2Inficon GmbH
- Method for operating a group of pressure sensors25 Nov 2025US 12,480,831 B2Inficon GmbH
- Diaphragm pressure gauge and compound pressure gauge14 Oct 2025US 12,442,706 B2Q'z Corporation
- Partial pressure gauge assembly for process contaminant detection using photoionization and associated method21 Jan 2025US 12,203,887 B2Inficon GmbH
- Diaphragm pressure gauge and compound pressure gauge15 Jan 2026US 2026/0016357 A1Q'z Corporation
- Chamber for an ionization vacuum gauge6 Feb 2025US 2025/0046589 A1Inficon GmbH
- Chamber for an ionization vacuum gauge13 Jun 2024US 2024/0194465 A1Inficon GmbH
- Vacuum feedthrough, electrode assembly, and device for generating a silent plasma discharge13 Jun 2024US 2024/0196508 A1Inficon GmbH
- Partial pressure gauge assembly for process contaminant detection using photoionization and associated method14 Mar 2024US 2024/0085374 A1Cosmex Co., Ltd.
Most cited
By later US patents
- Cold cathode gauge fast response signal circuit53US 8,928,329 B2MKS Instruments, Inc. · 2015
- Temperature compensation for pressure gauge34US 4,866,640 AGranville-Phillips Company · 1989
- Wide-range combination vacuum gauge29US 7,207,224 B2Brooks Automation, Inc. · 2007
- Ionization gauge and method of using and calibrating same28US 5,422,573 AGranville-Phillips Company · 1995
- Gas pressure gage24US 4,747,311 ASeiko Instruments Inc. · 1988