Diaphragm pressure gauge and compound pressure gauge
AssigneeQ'z Corporation
InventorHisao Hojoh
Life of this patent
Estimating the term…
Abstract
A diaphragm pressure gauge includes: a structure disposed under pressure to be measured; two diaphragms attached to the structure so as to oppose each other; and a detection element that is fixed to the two diaphragms to detect displacements of the two diaphragms. In each of the two diaphragms, when one of two surfaces is designated an opposing surface and the other surface is designated a non-opposing surface, the structure and the two diaphragms set a space faced by one of the opposing surface and the non-opposing surface as an airtight space to be kept in a reference vacuum, and the other of the opposing surface and the non-opposing surface is subjected to the pressure to be measured.
Claims14
A diaphragm pressure gauge, comprising:
- a structure disposed under pressure to be measured;
- two diaphragms attached to the structure so as to oppose each other;
- and
- a detection element having both ends that are fixed to the two diaphragms to detect displacements of the two diaphragms,
- wherein the two diaphragms include two opposing surfaces and two non-opposing surfaces, an airtight space surrounded by the structure and the two diaphragms is kept in a reference vacuum, and the two diaphragms are displaced according to a differential pressure between the reference vacuum acting on the two opposing surfaces and the pressure to be measured acting on the two non-opposing surfaces, and the displacements of the two diaphragms have equal absolute values in opposite directions.
A method for measuring pressure by a diaphragm pressure gauge, comprising:
- preparing the diaphragm pressure gauge under pressure to be measured, wherein the diaphragm pressure gauge includes a structure, two diaphragms attached to the structure so as to oppose each other in which the two diaphragms include two opposing surfaces and two non-opposing surfaces, and a detection element having both ends that are fixed to the two diaphragms to detect displacements of the two diaphragms;
- keeping an airtight space surrounded by the structure and the two diaphragms in a reference vacuum;
- subjecting the two non-opposing surfaces to the pressure to be measured;
- and
- displacing the two diaphragms according to a differential pressure between the reference vacuum acting on the two opposing surfaces and the pressure to be measured acting on the two non-opposing surfaces, wherein the displacements of the two diaphragms have equal absolute values in opposite directions.
A method for measuring pressure by a compound pressure gauge comprising:
- providing the compound pressure gauge under pressure to be measured, wherein the compound pressure gauge includes a diaphragm pressure gauge and an ionization vacuum gauge, wherein the diaphragm pressure gauge has a structure, wherein two diaphragms are attached to the structure to oppose each other, wherein the two diaphragms include two opposing surfaces and two non-opposing surfaces, and wherein a crystal oscillator is fixed to the two diaphragms to detect displacements of the two diaphragms;
- keeping an airtight space surrounded by the structure and the two diaphragms in a reference vacuum;
- and
- subjecting the two non-opposing surfaces to the pressure to be measured while overlapping a pressure measurement region of the diaphragm pressure gauge and a pressure measurement region of the ionization vacuum gauge with each other.
Dependencies are inferred from the claim text.