Partial pressure gauge assembly for process contaminant detection using photoionization and associated method
AssigneeInficon GmbH
InventorsShawn M. Briglin, Michael F. Vollero, John Gordon Wiley
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AssigneeInficon GmbH
InventorsShawn M. Briglin, Michael F. Vollero, John Gordon Wiley
Estimating the term…
A photoionization sensor assembly includes a housing defining a chamber with a first end and an opposing second end and being permeable to the analyte gas and non-analyte gases. A radiation source is structured to emit photons into the chamber. A first, second and third electrode are positioned in the chamber. The photons ionize the analyte gas, are insufficient to ionize the non-analyte gases, and causing ejection of photoelectrons from the third electrode. A controller is structured to receive a measurement of a total pressure and electrically bias the electrodes to collect the photoelectrons on the first and second electrodes in a ratio dependent on the total pressure. The controller is structured to determine the ratio of photoelectrons that are collected on the first and second electrodes at the total pressure and determine an amount of electrical current due to ionization by correcting the measured current using the determined ratio.
A sensor assembly for measuring a total pressure of a gas, comprising:
A photoionization sensor assembly configured to measure an analyte gas in a presence of non-analyte gases, comprising:
A method for measuring an analyte gas in a presence of non-analyte gases, comprising:
A method of measuring a total pressure of a gas, comprising:
Dependencies are inferred from the claim text.