Gas leak detection device and gas leak detection method for identifying a gas leak in a test object
AssigneeInficon GmbH
InventorsDaniel Wetzig, Marcel Ruth, Silvio Decker, Thomas Grellmann
Life of this patent
Estimating the term…
Abstract
A gas leak detection device for identifying a gas leak in a test object is disclosed, comprising a connector for the test object or a test chamber accommodating the test object, a vacuum pump connected to the connector for evacuating the test object or the test chamber, a gas detector connected to the vacuum pump and the connector and configured for detection of a first test gas and for integral leak detection or for localized leak detection of a gas leak in the test object according to the spraying principle during continuous operation of the vacuum pump, a gas pressure sensor connected to the vacuum pump and the connector.
Claims10
A gas leak detection device for identifying a gas leak in a test object, comprising
- a connector for the test object or for a test chamber accommodating the test object;
- a vacuum pump connected to the connector for evacuating the test object or test chamber;
- a gas detector connected to the vacuum pump and to the connector and configured for detection of a first test gas and for integral leak detection or for localized leak detection of a gas leak in the test object according to the spraying principle during continuous operation of the vacuum pump,
- a gas pressure sensor connected to the vacuum pump and to the connector and configured for integral measurement of the total pressure increase at the connector according to the pressure increase method, and
- a blocking device configured for separating, in terms of vacuum, the gas pressure sensor and the connector from the vacuum pump when the test object is examined by means of the gas pressure sensor;
- and
- wherein a gas conducting path connecting the connector to the vacuum pump comprises a booster pump, and the gas pressure sensor is arranged in the gas conducting path between the booster pump and the vacuum pump and thus downstream of the booster pump and upstream of the vacuum pump.
A gas leak detection method for identifying a gas leak in a test object, comprising the following steps in any order:
- determining a gas leak in the test object by supplying a first test gas to the test object or to a test chamber surrounding the test object and detecting the first test gas on the basis of integral leak detection or on the basis of localizing leak detection according to the spraying principle during continuous evacuation of the test object or of the test chamber by means of a vacuum pump, and
- identifying a gas leak in the test object by supplying at least one second test gas different from the first test gas to the test object or to the test chamber, and by integral measurement of the total pressure increase in the test object or the test chamber according to the pressure increase method, while the test object or the test chamber and the gas pressure sensor are disconnected from the vacuum pump and thus the test object or the test chamber is not evacuated;
- wherein the total pressure increase is measured in a gas conducting path which connects the outlet of a booster pump, whose inlet is connected to the connector for the test object or the test chamber, to the vacuum pump and/or to a gas detector such that the total pressure increase is measured downstream of the booster pump and upstream of the vacuum pump and/or the gas detector.
Dependencies are inferred from the claim text.