Ion source
OwnerRaffael Ferdigg, Peter Hofmanninventors
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Abstract
The invention relates, inter alia, to an ion source (10) for generating ions (16) or ion beams (16a), comprising an ion generation chamber (11) in which the ions (16) are generated. In order to monitor the ion source (10) and in particular to ensure its safety, it is realised according to the invention that the ion source (10) comprises a pressure measuring device (30) associated with the ion generation chamber (11), wherein the pressure measuring device (30) comprises a first pressure measuring device (31), which is designed in particular in the form of a gas friction pressure gauge, or which comprises in particular a gas friction pressure gauge. Furthermore, the invention also relates to a method for handling such an ion source (10).
Claims15
for generating ions (16) or ion beams (16a), comprising an ion generation chamber (11) for generating the ions (16), and a pressure measuring device (30) associated with the ion generation chamber (11), the pressure measuring device (30) comprising a first pressure measuring device (31), which is designed in particular in the form of a gas friction pressure gauge, or which comprise in particular a gas friction pressure gauge.
Dependencies are inferred from the claim text.