G01B 2210/62
Support for workpiece air film or bearing with positive or negative pressure
G01B2210/62 (Support for workpiece air film or bearing with positive or negative pressure) appears on 18 US grants and 10 published applications in this corpus.
Search patents in G01B- Granted patents
- 18
- Published applications
- 10
- Assignees
- 14
- Inventors
- 28
- Latest grant
- 23 Jul 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 2 | 0 |
| 1991 | 2 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 1 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 1 | 0 |
| 2009 | 0 | 1 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 1 | 2 |
| 2016 | 0 | 0 |
| 2017 | 1 | 0 |
| 2018 | 0 | 0 |
| 2019 | 0 | 0 |
| 2020 | 0 | 1 |
| 2021 | 2 | 2 |
| 2022 | 0 | 2 |
| 2023 | 1 | 1 |
| 2024 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Positioning system for positioning an object23 Jul 2024US 12,044,520 B2Dutch United Instruments B.V.
- High precision air bearing stage with capability of parasitic error compensation10 Oct 2023US 11,784,084 B2Sanying Motioncontorl(Tianjin) Instrument Co., Ltd.
- Wafer shape and flatness measurement apparatus and method31 Aug 2021US 11,105,753 B2Nanjing LiAn Semiconductor Limited
- Device and method for measuring objects17 Aug 2021US 11,092,428 B2GOM GmbH
- Method for determining the orientation of at least one rail and device for carrying out the method5 Sep 2017US 9,752,871 B2Robert Bosch GmbH
- A high precision air bearing stage with capability of parasitic error compensation25 May 2023US 2023/0163016 A1Sanying Motioncontrol (Tianjin) Instrument Co., Ltd.
- Air-bearing chuck21 Apr 2022US 2022/0118587 A1Nanjing LiAn Semiconductor Limited
- Positioning system for positioning an object10 Mar 2022US 2022/0074737 A1Dutch United Instruments B.V.
- Tool architecture for wafer geometry measurement in semiconductor industry12 Aug 2021US 2021/0247178 A1Nanjing LiAn Semiconductor Limited
- Wafer shape and flatness measurement apparatus and method1 Jul 2021US 2021/0199597 A1Nanjing LiAn Semiconductor Limited
Most cited
By later US patents
- Web thickness measurement system89US 6,281,679 B1Honeywell-Measurex Corporation · 2001
- Sheet-contacting thickness gauges16US 5,074,050 AAccuray Incorporated · 1991
- Sheet measuring apparatus with two structurally isolated non-contacting surface follower bodies and wireless signal transmission14US 4,528,507 AAccuray Incorporated · 1985
- Gauge having a surface follower with peripheral vent11US 4,434,649 AAccuray Incorporated · 1984
- Thickness gauge for moving sheet material with inner and outer flexibly mounted bearings11US 4,929,895 AImpact Systems, Inc. · 1990