A high precision air bearing stage with capability of parasitic error compensation

A high-precision air floating motion platform for wafer test, comprising:

• a base used as a seat in the wafer test process;
• a beam installed on the base;
• a sliding table capable of sliding along a surface of the beam, and a top of the sliding table being capable of carrying a wafer;
• a linear motor configured to drive the sliding table to slide along the beam;
• at least three sensors distributed on sides of the sliding table, and configured to detect a vertical straightness of the wafer;
• air bearings comprising a first air bearing, a second air bearing and a third air bearing;
• the first air bearing and the second air bearing being configured for a side limited suspension of the sliding table, and the third air bearing being configured for a bottom limited suspension of the sliding table;
• and
• a compensation device located above the sliding table, and the compensation device being configured to compensate the vertical straightness of the wafer based on a real-time data detected by the sensors.