Positioning system for positioning an object

A measurement system for determining geometrical properties of an object to be measured, wherein the measurement system comprises a measurement unit and a positioning system for positioning one of the object to be measured and the measurement unit with respect to the other of the object to be measured and the measurement unit;

• wherein the positioning system comprises a stacked stage system, wherein the stacked stage system is movable on a reference surface, and wherein the stacked stage system comprises:
• a driving system for driving the stacked stage system;
• a first stage that is arranged to be driven along a driving plane parallel to the plane of the reference surface;
• a main stage for supporting the object, wherein the main stage is arranged on the driven first stage for moving the main stage along the driving plane, and
• wherein the main stage is movable with respect to the first stage in the out-of-plane direction and wherein the main stage further comprises a support bearing arranged to movably support the main stage on the reference surface in said out-of-plane direction.