F16K 51/02
Valves: other details not peculiar to particular types of valves or cut-off
Official title: specially adapted for high-vacuum installations
F16K51/02 (Valves: other details not peculiar to particular types of valves or cut-off) appears on 612 US grants and 564 published applications in this corpus.
Search patents in F16K- Granted patents
- 612
- Published applications
- 564
- Assignees
- 240
- Inventors
- 1,054
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 5 | 0 |
| 1977 | 3 | 0 |
| 1978 | 7 | 0 |
| 1979 | 3 | 0 |
| 1980 | 4 | 0 |
| 1981 | 3 | 0 |
| 1982 | 3 | 0 |
| 1983 | 3 | 0 |
| 1984 | 5 | 0 |
| 1985 | 4 | 0 |
| 1986 | 5 | 0 |
| 1987 | 2 | 0 |
| 1988 | 6 | 0 |
| 1989 | 4 | 0 |
| 1990 | 8 | 0 |
| 1991 | 3 | 0 |
| 1992 | 7 | 0 |
| 1993 | 7 | 0 |
| 1994 | 3 | 0 |
| 1995 | 3 | 0 |
| 1996 | 3 | 0 |
| 1997 | 8 | 0 |
| 1998 | 8 | 0 |
| 1999 | 9 | 0 |
| 2000 | 15 | 0 |
| 2001 | 18 | 4 |
| 2002 | 24 | 22 |
| 2003 | 17 | 13 |
| 2004 | 10 | 15 |
| 2005 | 11 | 15 |
| 2006 | 15 | 25 |
| 2007 | 10 | 22 |
| 2008 | 11 | 19 |
| 2009 | 12 | 27 |
| 2010 | 18 | 21 |
| 2011 | 14 | 25 |
| 2012 | 19 | 20 |
| 2013 | 18 | 12 |
| 2014 | 22 | 25 |
| 2015 | 15 | 21 |
| 2016 | 22 | 19 |
| 2017 | 17 | 20 |
| 2018 | 14 | 35 |
| 2019 | 23 | 23 |
| 2020 | 32 | 34 |
| 2021 | 30 | 20 |
| 2022 | 31 | 33 |
| 2023 | 18 | 24 |
| 2024 | 25 | 23 |
| 2025 | 18 | 26 |
| 2026 | 17 | 21 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Automatic pressure control device, film forming apparatus and pressure control method25 Aug 2026US 12,716,520 B2Ckd Corporation
- Fluid delivery system18 Aug 2026US 12,710,773 B2Ichor Systems, Inc.
- Method for determining a correction valve for a regulating device for a regulating valve4 Aug 2026US 12,698,846 B2VAT Holding AG
- Multi-piece slit valve gate28 Jul 2026US 12,692,947 B2APPLIED Materials.Inc.
- Vacuum angle valve comprising a pressure sensor21 Jul 2026US 12,687,243 B2VAT Holding AG
- Gate valve27 Aug 2026US 2026/0251222 A1Hirata Corporation
- Flap valve and seal with improved seal geometry for such a valve13 Aug 2026US 2026/0235221 A1VAT Holding AG
- Reactor gate valve6 Aug 2026US 2026/0226989 A1
- Proportional Vacuum Valve Apparatus30 Jul 2026US 2026/0218809 A1Parker Hannifin EMEA S.à.r.l.
- Smooth pneumatic vacuum valve30 Jul 2026US 2026/0218813 A1VAT Holding AG
Most cited
By later US patents
- Semiconductor processing system with gas curtain612US 5,997,588 AAdvanced Semiconductor Materials America, Inc. · 1999
- Bellows driver slot valve587US 5,975,492 A1999
- High vacuum gate valve having improved metal vacuum joint551US 4,718,637 AMDC Vacuum Products Corporation · 1988
- Lockout tagout for semiconductor vacuum valve500US 9,404,587 B2ASM IP Holding B. V. · 2016
- Reduced pressure and normal pressure treatment apparatus452US 5,769,952 ATokyo Electron Limited · 1998