Vacuum angle valve comprising a pressure sensor

A vacuum valve for gas-tight interruption of a flow path, comprising

• a valve housing having
• a first port in the direction of a first axis,
• a second port in the direction of a second axis, and
• a valve seat arranged in the flow path of a flow chamber, wherein the flow chamber interconnects the first port and the second port,
• a valve disk, which is at least partially axially displaceably guided within the flow chamber along the first axis perpendicularly to a surface of the valve seat by an adjustment path in such a way that a closure surface of the valve disk facing the valve seat can be brought into a closing position for the gas-tight interruption of the flow path and, in this process, can be brought into contact with the valve seat, and can be provided for releasing the flow path in an open position without contact with the valve seat,
• a drive unit, wherein the drive unit is coupled to the valve disk in such a way that a controlled displacement of the valve disk along or orthogonally to the first axis can be provided by means of the drive unit, and
• a control unit for controlling the displacement of the valve disk,
• wherein
• the vacuum valve has a pressure sensor arranged in such a way that a process pressure present in the flow chamber can be measured by means of the pressure sensor,
• the control unit comprises a process control functionality for the control of a process step, which is arranged in such a way that during its execution
• a provided process information is processed,
• the process pressure present in the flow chamber is measured by the pressure sensor, and
• the displacement of the valve disk is controlled depending on the processed process information and the process pressure, and
• wherein the process control functionality is designed in such a way that a displacement speed for the displacement of the valve disk can be set as a function of the process information.

A vacuum valve for gas-tight interruption of a flow path, comprising

• a valve housing having
• a first port in the direction of a first axis,
• a second port in the direction of a second axis, and
• a valve seat arranged in the flow path of a flow chamber, wherein the flow chamber interconnects the first port and the second port,
• a valve disk, which is at least partially axially displaceably guided within the flow chamber along the first axis perpendicularly to a surface of the valve seat by an adjustment path in such a way that a closure surface of the valve disk facing the valve seat can be brought into a closing position for the gas-tight interruption of the flow path and, in this process, can be brought into contact with the valve seat, and can be provided for releasing the flow path in an open position without contact with the valve seat,
• a drive unit, wherein the drive unit is coupled to the valve disk in such a way that a controlled displacement of the valve disk along or orthogonally to the first axis can be provided by means of the drive unit, and
• a control unit for controlling the displacement of the valve disk,
• wherein
• the vacuum valve has a pressure sensor arranged in such a way that a process pressure present in the flow chamber can be measured by means of the pressure sensor,
• the control unit comprises a process control functionality for the control of a process step, which is arranged in such a way that during its execution
• a provided process information is processed,
• the process pressure present in the flow chamber is measured by the pressure sensor, and
• the displacement of the valve disk is controlled depending on the processed process information and the process pressure, and
• wherein the vacuum valve comprises a sleeve, wherein
• the sleeve is shaped and arranged such that an intermediate space is formed between a
• sleeve wall of the sleeve and an inner wall of the valve housing,
• the sleeve wall has a sleeve recess, and
• the sleeve recess connects the intermediate space and the flow chamber.