Smooth pneumatic vacuum valve

A vacuum transfer valve (1), comprising:

• a valve wall (8), which has an opening (2) and a valve seat (3) running around the opening (2);
• a closure plate (4) with a closure side for closing the opening (2) in a gas-tight manner;
• a drive unit (10) which is coupled to the closure plate (4) by a valve rod (5) and which is configured such that the closure plate (4) is moveable from an open position (O), in which the closure plate (4) releases the opening (2), into a closing position (C), in which a closure side of the closure plate (4) is pressed against the valve seat (3) and closes the opening (2) in gas-tight manner, and back again;
• wherein the drive unit (10) comprises:
• a first pneumatic actuator (11) which is coupled to the valve rod (5) and which is configured to provide moveability of the closure plate (4) in a first direction,
• a second pneumatic actuator (14) which is coupled to the valve rod (5) and which is configured to provide moveability of the closure plate (4) in a second direction,
• a first pressure sensor (13) arranged and configured to measure a first actuation pressure in the first pneumatic actuator (11),
• a second pressure sensor (16) arranged and configured to measure a second actuation pressure in the second pneumatic actuator (14),
• a first fluid flow controller (12) arranged and configured to provide a defined flow of actuation fluid to or from the first pneumatic actuator (11), and
• a second fluid flow controller (15) arranged and configured to provide a defined flow of the actuation fluid to or from the second pneumatic actuator (14).