Multi-piece slit valve gate

A slit valve comprising:

• a slit valve opening;
• a slit valve actuator;
• and
• a slit valve gate coupled to the slit valve actuator, wherein the slit valve gate is configured to seal the slit valve opening responsive to the slit valve actuator moving the slit valve gate to a closed position, wherein the slit valve gate comprises:
• a base portion comprising a first angled alignment feature, wherein the slit valve gate is coupled to the slit valve actuator via the base portion, wherein the base portion forms a recess;
• a seal portion coupled to the base portion, wherein the base portion forms a receiving area for the seal portion, wherein the first angled alignment feature extends from a bottom of the recess to the receiving area for the seal portion, and wherein the seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of the slit valve opening responsive to the slit valve actuator moving the slit valve gate to the closed position;
• and
• a clamp portion coupled to the base portion and comprising a second angled alignment feature extending from a first side of the clamp portion to a second side of the clamp portion, wherein the second angled alignment feature is configured to interface with the first angled alignment feature of the base portion to align the clamp portion with respect to the base portion, wherein the clamp portion retains the seal portion at least partially between the clamp portion and the base portion.

A slit valve gate, comprising:

• a base portion configured to couple to a slit valve actuator and comprising a first angled alignment feature, wherein the base portion forms a recess;
• a seal portion coupled to the base portion, wherein the base portion forms a receiving area for the seal portion, wherein the first angled alignment feature extends from a bottom of the recess to the receiving area for the seal portion, and wherein the seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of a slit valve opening;
• and
• a clamp portion coupled to the base portion and comprising a second angled alignment feature extending from a first side of the clamp portion to a second side of the clamp portion, wherein the second angled alignment feature is configured to interface with the first angled alignment feature, wherein the clamp portion retains the seal portion at least partially between the clamp portion and the base portion, and wherein at least one of the clamp portion or the base portion forms one or more first vent features configured to vent a first region formed between the clamp portion and the base portion.