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US 9,404,587 B2Granted
Lockout tagout for semiconductor vacuum valve
AssigneeASM IP Holding B.V.
InventorsJohn Shugrue, Ron Moen
Life of this patent
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Abstract
A device for limiting travel of a valve including a body removably connected to a transfer module, a vacuum valve, or a reaction chamber, a travel limiting rod passing through the body to engage and limit travel of the valve, and wherein the body includes at least one mounting flange opposite the travel limiting rod.
Claims19
A device for limiting travel of a valve comprising:
- a body removably connected to a vacuum valve or a reaction chamber, the body comprising a cutout to receive a portion of a gate of the valve, wherein the gate moves linearly in a first direction;
- a travel limiting rod passing through the body to engage and limit travel of the gate along the first direction by moving the travel limiting rod in a second direction opposite the first direction;
- wherein the body includes at least one mounting flange opposite the travel limiting rod;
- and
- wherein the travel limiting rod is rotatable in a first rotational direction to restrict valve movement and rotatable in a second rotational direction to permit valve movement.
2 more elements
A method of locking out a vacuum valve comprising the steps of:
- providing a vacuum valve comprising a gate that moves in a first direction;
- mounting a body to the vacuum valve or a surface;
- positioning a travel limiting rod within a portion of the body to limit travel of the gate along the direction;
- moving the travel limiting rod in a second direction opposite the first direction to a position which restricts movement of the vacuum valve;
- and
- wherein the travel limiting rod is rotated into contact with a valve pin of the vacuum valve.
3 more elements
Dependencies are inferred from the claim text.