US 12,710,773 B2 · Fluid delivery system

Abstract

Systems for processing articles are essential for semiconductor fabrication. In one embodiment, a system is disclosed comprising a plurality of fluid supplies configured to supply process fluids, a plurality of apparatuses for controlling flow, a plurality of mounting substrates, a vacuum manifold fluidly coupled to the plurality of mounting substrates, an outlet manifold fluidly coupled to the plurality of mounting substrates, a vacuum source fluidly coupled to the vacuum manifold, and a processing chamber fluidly coupled to the outlet manifold. The plurality of apparatuses for controlling flow have a bleed port and an outlet. The outlets of the plurality of apparatuses are fluidly coupled to corresponding outlet ports of the plurality of mounting substrates. The bleed ports of the plurality of apparatuses are fluidly coupled to the corresponding vacuum ports of the plurality of mounting substrates.

Claims7

Dependent claims

An apparatus for controlling flow of a process fluid, the apparatus comprising:

an inlet;
an outlet;
a bleed port;
a flow path extending from the inlet to the outlet;
a bleed path extending from the flow path, the bleed path comprising the bleed port;
a first valve operably coupled to the flow path and located between the inlet and the outlet, the first valve configured to control flow of the process fluid in the flow path;
a flow restrictor having a flow impedance, the flow restrictor operably coupled to the flow path and located between the inlet and the outlet;
a second valve operably coupled to the flow path and located between the inlet and the outlet, the second valve configured to control flow of the process fluid from the flow path to the bleed port, wherein the second valve comprises:
a valve seat;
and
a closure element configured to sealingly engage the valve seat, wherein the valve seat is positioned in the bleed path and not the flow path;
and
a mounting portion, the mounting portion comprising the outlet and the bleed port.

10 more elements

Dependencies are inferred from the claim text.

Fluid delivery system

Life of this patent

Fluid delivery system

Life of this patent

Abstract

Claims7