Proportional Vacuum Valve Apparatus
AssigneeParker Hannifin EMEA S.à.r.l.
InventorAlan J. Smith
Life of this patent
Estimating the term…
Abstract
Proportional vacuum valve apparatus (100) has a vacuum supply port (112), a vacuum outlet port (106) in communication with the vacuum supply port (112), a valve seat (110), and a valve element (114) movable into and out of engagement with the valve seat (110) to close and open the valve permitting vacuum flow between the vacuum outlet port (106) and the vacuum supply port (112). A control arrangement is operable to open and close the valve. The control arrangement provides a proportional positive pressure supply to pilot operation of the valve element (114). The apparatus is particularly suited to being used in silicon wafer fabrication processes.
Claims17
A proportional vacuum valve apparatus, comprising:
- a vacuum supply port;
- a vacuum outlet port in communication with the vacuum supply port;
- a valve seat;
- a valve element movable into and out of engagement with the valve seat to close and open the proportional vacuum valve apparatus permitting vacuum flow between the vacuum outlet port and the vacuum supply port;
- and
- a control arrangement operable to open and close the proportional vacuum valve apparatus;
- wherein the control arrangement comprises a proportional positive pressure supply for pilot operation of the valve element.
A method of controlling a vacuum valve comprising a vacuum supply port, a vacuum outlet port in communication with the vacuum supply port and a valve seat, and a valve element being movable into and out of engagement with the valve seat to close and open the vacuum valve permitting vacuum flow between the vacuum outlet port and the vacuum supply port, wherein the method comprises:
- using a proportional positive pressure gas supply for pilot operation of the valve element.
A wafer fabrication or handling apparatus for a silicon chip manufacturing process, the wafer fabrication or handling apparatus including a proportional vacuum valve apparatus comprising:
- a vacuum supply port;
- a vacuum outlet port in communication with the vacuum supply port;
- a valve seat;
- a valve element movable into and out of engagement with the valve seat to close and open the proportional vacuum valve apparatus permitting vacuum flow between the vacuum outlet port and the vacuum supply port;
- and
- a control arrangement operable to open and close the proportional vacuum valve apparatus;
- wherein the control arrangement comprises a proportional positive pressure supply for pilot operation of the valve element.
(canceled)
Dependencies are inferred from the claim text.