F16K 31/007
Piezoelectric stacks
Official title: {Piezoelectric stacks}
F16K31/007 (Piezoelectric stacks) appears on 205 US grants and 182 published applications in this corpus.
Search patents in F16K- Granted patents
- 205
- Published applications
- 182
- Assignees
- 102
- Inventors
- 399
- Latest grant
- 9 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 4 | 0 |
| 1986 | 0 | 0 |
| 1987 | 3 | 0 |
| 1988 | 1 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 7 | 0 |
| 1993 | 3 | 0 |
| 1994 | 3 | 0 |
| 1995 | 3 | 0 |
| 1996 | 2 | 0 |
| 1997 | 0 | 0 |
| 1998 | 4 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 12 | 1 |
| 2002 | 2 | 7 |
| 2003 | 5 | 5 |
| 2004 | 6 | 8 |
| 2005 | 2 | 3 |
| 2006 | 2 | 2 |
| 2007 | 6 | 3 |
| 2008 | 0 | 2 |
| 2009 | 0 | 2 |
| 2010 | 5 | 6 |
| 2011 | 0 | 2 |
| 2012 | 4 | 2 |
| 2013 | 1 | 6 |
| 2014 | 2 | 6 |
| 2015 | 3 | 13 |
| 2016 | 5 | 11 |
| 2017 | 11 | 8 |
| 2018 | 7 | 7 |
| 2019 | 12 | 15 |
| 2020 | 10 | 15 |
| 2021 | 17 | 9 |
| 2022 | 16 | 13 |
| 2023 | 6 | 15 |
| 2024 | 16 | 6 |
| 2025 | 9 | 12 |
| 2026 | 6 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Fluid control valve, fluid control device and drive circuit9 Jun 2026US 12,650,176 B2HORIBA STEC, Co., Ltd.
- Proportional fluid flow valve and methods of operating thereof26 May 2026US 12,638,098 B2APPLIED Materials.Inc.
- Mass flow controller, flow control method using the same, and substrate processing method including the same26 May 2026US 12,638,866 B2Samsung Electronics Co., Ltd.
- Fluid control valve, fluid control device, and fluid control valve manufacturing method5 May 2026US 12,618,477 B2HORIBA STEC, Co., Ltd.
- Fluid control device, fluid control method, and fluid control program7 Apr 2026US 12,596,387 B2HORIBA STEC, Co., Ltd.
- Piezoelectric valve21 May 2026US 2026/0139755 A1SMC Corporation
- Piezoelectric valve21 May 2026US 2026/0139756 A1SMC Corporation
- Miniaturized hydraulic valve, and applications thereof in robot systems5 Feb 2026US 2026/0036220 A1Sanctuary Cognitive Systems Corporation
- Fluid control valve, fluid control device, and method for manufacturing orifice4 Dec 2025US 2025/0369519 A1HORIBA STEC, Co., Ltd.
- Fluid control valve and fluid control device20 Nov 2025US 2025/0354613 A1
Most cited
By later US patents
- Fluid control device95US 4,695,034 ASTEC, Inc. · 1987
- Fluid control and shut off valve64US 5,100,100 AMKS Instruments, Inc. · 1992
- Toilet bowl flushing device60US 4,989,277 AToto Ltd. · 1991
- Piezoelectric actuator, and valve apparatus having actuator50US 4,471,256 ANippon Soken, Inc. · 1984
- Toilet bowl flushing device47US 5,469,586 AToto Ltd. · 1995