Proportional fluid flow valve and methods of operating thereof
AssigneeApplied Materials, Inc.
InventorSrikanth Krishnamurthy
Life of this patent
Estimating the term…
Abstract
Certain embodiments of the present disclosure relate to a fluid flow valve. The valve includes a housing configured to receive a flow of fluid. The valve further includes a diaphragm to actuate between a closed position and a plurality of open positions. The valve further includes a first valve portion configured to flow a first amount of fluid responsive to the diaphragm actuating to one or more first open positions of the plurality of open positions. The valve further includes a second valve portion in parallel with the first valve portion and configured to flow a second amount of fluid responsive to the diaphragm actuating to one or more second open positions of the plurality of open positions.
Claims20
A fluid flow valve, comprising:
- a housing configured to receive a flow of fluid;
- a diaphragm configured to actuate between a closed position and a plurality of open positions;
- a first valve portion configured to flow a first amount of fluid responsive to the diaphragm actuating to one or more first open positions of the plurality of open positions;
- and
- multiple second valve portions radially surrounding the first valve portion and configured to flow a second amount of fluid in parallel with the first valve portion responsive to the diaphragm actuating to one or more second open positions of the plurality of open positions.
A fluid flow system, comprising:
- a valve comprising:
- a housing configured to receive a flow of fluid;
- a diaphragm configured to actuate between a closed position and a plurality of open positions;
- a first valve portion;
- multiple second valve portions radially surrounding the first valve portion;
- and
- a processing device configured to:
- cause the first valve portion to flow a first amount of fluid by causing the diaphragm to actuate to one or more first open positions of the plurality of open positions;
- and
- cause the multiple second valve portions to flow a second amount of fluid in parallel with the first valve portion by causing the diaphragm to actuate to one or more second open positions of the plurality of open positions.
A method, comprising:
- receiving target flow data associated with a flow of fluid through a valve having a first valve portion and multiple second valve portions radially surrounding the first valve portion;
- causing a diaphragm to actuate to one or more first open positions to flow a first amount of fluid through the first valve portion based at least in part on the target flow data;
- and
- causing the diaphragm to actuate to one or more second open positions to flow a greater second amount of fluid through at least the multiple second valve portions in parallel with the first valve portion based at least in part on the target flow data.
Dependencies are inferred from the claim text.