Fluid control valve and fluid control device
OwnerKazuya SHAKUDO, Yuki HIDAinventors
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Abstract
The present invention reduces seat leakage while increasing a flow rate, and includes an orifice 31 having a valve seat surface 31s and a valve body 32 having a seating surface 32s seated on the valve seat surface 31s. The orifice 31 has an annular groove M1 formed in the valve seat surface 31s and an internal flow path L1 communicating with an upstream flow path R1 and opened in the annular groove M1. The internal flow path L1 is opened on the same plane as the valve seat surface 31s and extends outward of the annular groove M1 in plan view.
Claims10
A fluid control valve that controls a fluid from an upstream flow path to flow out to a downstream flow path, the fluid control valve comprising:
- an orifice having a valve seat surface;
- and
- a valve body having a seating surface seated on the valve seat surface,
- wherein the orifice includes
- an annular groove formed in the valve seat surface, and
- an internal flow path communicating with the upstream flow path or the downstream flow path and opened in the annular groove,
- the internal flow path is opened on a same plane as the valve seat surface, and an opening of the internal flow path extends outward of the annular groove in a plan view.
Dependencies are inferred from the claim text.