Piezoelectric actuator, and valve apparatus having actuator
AssigneeNippon Soken, Inc.
InventorsToshihiko Igashira, Yasuyuki Sakakibara, Eturo Yasuda
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AssigneeNippon Soken, Inc.
InventorsToshihiko Igashira, Yasuyuki Sakakibara, Eturo Yasuda
Estimating the term…
A piezoelectric actuator comprising a tubular casing and an elongated piezoelectric member disposed in the casing. The piezoelectric member has axially spaced ends, one of which abuts the shoulder of the casing. The piezoelectric member expands and contracts in response to an applied voltage, another end effecting a pumping operation. The piezoelectric member forms first and second longitudinal surfaces extending along substantially the entire length of axis. The piezoelectric member is formed as a lamination of a plurality of piezoelectric plates, to each of which is applied an electrode element on one of lateral surfaces. The electrode elements protrude on the first or second surfaces, alternately. First and second electrode members are located at the first and second surfaces, respectively. The first surface may be a surface of an opening which extends through the piezoelectric member, and the second surface may be a surface of an outer cylindrical surface of the piezoelectric member. Since the outer cylindrical surface is kept in contact with the inner surface of the casing, no flashover occurs between the surfaces. The second surface also may be a surface of another opening which extends through the piezoelectric member. In this embodiment, since the outer cylindrical surface has no electrode element, no flashover occurs between the outer cylindrical surface and the inner surface of the casing. A valve apparatus having the above-mentioned actuator and a method of manufacturing a piezoelectric member are also disclosed.
A piezoelectric actuator comprising:
A piezoelectric actuator comprising:
A valve apparatus comprising:
A valve apparatus comprising:
Dependencies are inferred from the claim text.