Piezoelectric valve
AssigneesTDK Corporation, SMC Corporation
InventorsYoshiki OHTA, Hideya Sakamoto, Ryunosuke Abe, Takashi Watanabe
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Abstract
A piezoelectric valve includes a housing provided with an inflow hole and an outflow hole for air, and a valve element disposed in the housing and configured to open and close the inflow hole. The valve element is configured by a piezoelectric unit including a plate-shaped piezoelectric element and a diaphragm on which the piezoelectric element is stacked. The inflow hole does not overlap the piezoelectric element but overlaps only the diaphragm when viewed from a stacking direction of the piezoelectric element in the piezoelectric unit.
Claims7
A piezoelectric valve comprising:
- a housing provided with an inflow hole and an outflow hole for air;
- and
- a valve element disposed in the housing and configured to open and close the inflow hole,
- wherein the valve element is configured by a piezoelectric unit including a plate-shaped piezoelectric element and a diaphragm on which the piezoelectric element is stacked, and
- the inflow hole does not overlap the piezoelectric element but overlaps only the diaphragm when viewed from a stacking direction of the piezoelectric element in the piezoelectric unit.
Dependencies are inferred from the claim text.