Fluid control valve, fluid control device, and fluid control valve manufacturing method
AssigneeHORIBA STEC, Co., Ltd.
InventorKazuya Shakudo
Life of this patent
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Abstract
The present invention improves the sealability of a fluid control valve, and includes a valve seat having a flat valve seat surface and a valve plug having a flat sitting surface sitting on the valve seat surface. A first surface that is one of the valve seat surface and the sitting surface has a surface hardness higher than a surface hardness of a second surface that is the other one of the valve seat surface and the sitting surface.
Claims7
A fluid control valve comprising:
- a valve seat having a valve seat surface that is flat;
- and
- a valve plug having a sitting surface that is flat and that sits on the valve seat surface,
- wherein
- the valve seat and the valve plug are both made of metal,
- a first surface that is one of the valve seat surface and the sitting surface has a surface hardness higher than a surface hardness of a second surface that is the other one of the valve seat surface and the sitting surface, and
- a groove is formed in a member having the first surface so as to surround the first surface.
A method of manufacturing a fluid control valve including a valve seat having a valve seat surface that is flat and a valve plug having a sitting surface that is flat and that sits on the valve seat surface, wherein the valve seat and the valve plug are both made of metal, the method comprising:
- forming a groove so as to surround one of the valve seat surface and the sitting surface;
- and
- applying burnishing processing to the one of the valve seat surface and the sitting surface that is surrounded by the groove, so as to make a surface hardness of the one of the valve seat surface and the sitting surface higher than a surface hardness of the other one of the valve seat surface and the sitting surface.
Dependencies are inferred from the claim text.