Fluid control valve, fluid control device and drive circuit
AssigneeHORIBA STEC, Co., Ltd.
InventorHiroshi Takakura
Life of this patent
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Abstract
A drive circuit of a piezo actuator is provided with a flyback transformer whose primary winding is connected to a DC power supply, and whose secondary winding is connected to the piezo actuator, a charging switch that is connected to the primary winding, a discharging switch that is connected to the secondary winding, a regenerative capacitor that is connected to the primary winding and in which discharge energy from the piezo actuator is regenerated, and a switch control unit that controls ON/OFF operations of the charging switch and the discharging switch. The switch control unit controls the ON/OFF operations of the charging switch and the discharging switch so as to repeatedly charge and discharge the piezo actuator and thereby control the applied voltage of the piezo actuator.
Claims9
A fluid control valve comprising a piezo actuator and a drive circuit that is connected to the piezo actuator, wherein the drive circuit comprises:
- a flyback transformer whose primary winding is connected to a DC power supply, and whose secondary winding is connected to the piezo actuator;
- a charging switch that is connected to the primary winding and is turned ON and OFF in order to charge the piezo actuator;
- a discharging switch that is connected to the secondary winding and is turned ON and OFF in order to discharge the piezo actuator;
- a regenerative capacitor that is connected to the primary winding and in which discharge energy from the piezo actuator is regenerated;
- and
- a switch control unit that controls ON/OFF operations of the charging switch and the discharging switch, and wherein
- the switch control unit controls the ON/OFF operations of the charging switch and the discharging switch so as to repeatedly charge and discharge the piezo actuator, and thereby control the applied voltage of the piezo actuator.
A drive circuit that is connected to a piezo actuator, comprising:
- a flyback transformer whose primary winding is connected to a DC power supply, and whose secondary winding is connected to the piezo actuator;
- a charging switch that is connected to the primary winding and is turned ON and OFF in order to charge the piezo actuator;
- a discharging switch that is connected to the secondary winding and is turned ON and OFF in order to discharge the piezo actuator;
- a regenerative capacitor that is connected to the primary winding and in which discharge energy from the piezo actuator is regenerated;
- and
- a switch control unit that controls ON/OFF operations of the charging switch and the discharging switch, and wherein
- the switch control unit controls the charging switch and the discharging switch so as to repeatedly charge and discharge the piezo actuator, and thereby control the applied voltage of the piezo actuator.
Dependencies are inferred from the claim text.