C23F 1/26
For etching refractory metals
Official title: for etching refractory metals
C23F1/26 (For etching refractory metals) appears on 340 US grants and 387 published applications in this corpus.
Search patents in C23F- Granted patents
- 340
- Published applications
- 387
- Assignees
- 219
- Inventors
- 924
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 3 | 0 |
| 1977 | 0 | 0 |
| 1978 | 2 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 2 | 0 |
| 1982 | 1 | 0 |
| 1983 | 5 | 0 |
| 1984 | 1 | 0 |
| 1985 | 2 | 0 |
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 2 | 0 |
| 1989 | 2 | 0 |
| 1990 | 5 | 0 |
| 1991 | 1 | 0 |
| 1992 | 6 | 0 |
| 1993 | 7 | 0 |
| 1994 | 4 | 0 |
| 1995 | 4 | 0 |
| 1996 | 4 | 0 |
| 1997 | 2 | 0 |
| 1998 | 3 | 0 |
| 1999 | 7 | 0 |
| 2000 | 3 | 0 |
| 2001 | 4 | 4 |
| 2002 | 17 | 14 |
| 2003 | 11 | 13 |
| 2004 | 8 | 17 |
| 2005 | 10 | 17 |
| 2006 | 11 | 16 |
| 2007 | 4 | 7 |
| 2008 | 8 | 13 |
| 2009 | 9 | 14 |
| 2010 | 12 | 15 |
| 2011 | 7 | 13 |
| 2012 | 13 | 12 |
| 2013 | 8 | 14 |
| 2014 | 9 | 10 |
| 2015 | 14 | 26 |
| 2016 | 18 | 20 |
| 2017 | 7 | 11 |
| 2018 | 10 | 9 |
| 2019 | 12 | 23 |
| 2020 | 10 | 19 |
| 2021 | 18 | 17 |
| 2022 | 7 | 14 |
| 2023 | 8 | 18 |
| 2024 | 17 | 17 |
| 2025 | 10 | 18 |
| 2026 | 8 | 16 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Production method for etching liquid composition6 Oct 2026US 12,753,516 B2Kao Corporation
- Substrate processing apparatus and substrate processing method18 Aug 2026US 12,713,865 B2Tokyo Electron Limited
- Composition and method for treating substrate28 Jul 2026US 12,695,915 B2FUJIFILM Corporation
- Etching composition, method of etching metal-containing film by using the same, and method of preparing semiconductor device by using the same12 May 2026US 12,624,285 B2Samsung Electronics Co., Ltd.
- Etchant composition7 Apr 2026US 12,595,568 B2Kao Corporation
- Etchant composition, method of patterning metal layer and method of producing display device using the same1 Oct 2026US 2026/0297755 A1Dongwoo Fine-Chem Co., Ltd.
- Compositions for uniform etching of high aspect ratio structures10 Sep 2026US 2026/0265922 A1Entegris, Inc.
- Dental implant surface treatment method and dental implant surface-treated thereby30 Jul 2026US 2026/0215889 A1Osstemimplant Co., Ltd.
- Composition and method for creating nanoscale surface geometry on an implantable device30 Jul 2026US 2026/0218048 A1Tech Met, Inc.
- Etchant composition16 Jul 2026US 2026/0201569 A1Kao Corporation
Most cited
By later US patents
- Golf club head with a face composed of a forged material388US 6,354,962 B1Callaway Golf Company · 2002
- Multiple material golf club head377US 6,491,592 B2Callaway Golf Company · 2002
- Golf club head with customizable center of gravity364US 6,739,983 B2Callaway Golf Company · 2004
- Multiple material golf head356US 6,471,604 B2Callaway Golf Company · 2002
- High cofficient of restitution golf club head353US 6,390,933 B1Callaway Golf Company · 2002