C04B 41/5346
Dry etching
Official title: {Dry etching}
C04B41/5346 (Dry etching) appears on 100 US grants and 70 published applications in this corpus.
Search patents in C04B- Granted patents
- 100
- Published applications
- 70
- Assignees
- 89
- Inventors
- 302
- Latest grant
- 23 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 2 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 3 | 0 |
| 1984 | 2 | 0 |
| 1985 | 3 | 0 |
| 1986 | 2 | 0 |
| 1987 | 2 | 0 |
| 1988 | 3 | 0 |
| 1989 | 3 | 0 |
| 1990 | 3 | 0 |
| 1991 | 4 | 0 |
| 1992 | 0 | 0 |
| 1993 | 2 | 0 |
| 1994 | 7 | 0 |
| 1995 | 3 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 2 | 0 |
| 1999 | 4 | 0 |
| 2000 | 2 | 0 |
| 2001 | 5 | 2 |
| 2002 | 3 | 4 |
| 2003 | 2 | 1 |
| 2004 | 2 | 2 |
| 2005 | 1 | 3 |
| 2006 | 1 | 0 |
| 2007 | 3 | 1 |
| 2008 | 0 | 2 |
| 2009 | 1 | 3 |
| 2010 | 1 | 1 |
| 2011 | 2 | 1 |
| 2012 | 0 | 0 |
| 2013 | 1 | 0 |
| 2014 | 1 | 1 |
| 2015 | 0 | 2 |
| 2016 | 1 | 0 |
| 2017 | 0 | 1 |
| 2018 | 1 | 1 |
| 2019 | 1 | 2 |
| 2020 | 1 | 8 |
| 2021 | 1 | 4 |
| 2022 | 5 | 5 |
| 2023 | 2 | 7 |
| 2024 | 4 | 3 |
| 2025 | 4 | 14 |
| 2026 | 7 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Member for semiconductor manufacturing apparatus23 Jun 2026US 12,665,527 B2NGK Insulators, Ltd.
- Organometallic compounds for the deposition of high purity tin oxide and dry etching of the tin oxide films and deposition reactors16 Jun 2026US 12,655,164 B2Seastar Chemicals Ulc
- Thermally guided chemical etching of a substrate and real-time monitoring thereof9 Jun 2026US 12,652,988 B2Momentum Optics LLC
- Method for producing ceramic tiles2 Jun 2026US 12,643,834 B2Marazzi Group SRL
- Methods to remove an EBC from a substrate and to repair a coated component5 May 2026US 12,617,735 B2General Electric Company
- Producing a ceramic component16 Jul 2026US 2026/0202799 A1Rolex SA
- Selective etch of titanium carbide materials using oxidation22 Jan 2026US 2026/0022079 A1Tokyo Electron Limited
- Components having environmental barrier coatings and methods for forming the same4 Dec 2025US 2025/0368581 A1Honeywell International Inc.
- Dental workpiece and method for producing same13 Nov 2025US 2025/0345247 A1Kuraray Noritake Dental Inc.
- Sintered ceramic body and method of making13 Nov 2025US 2025/0346537 A1Heraeus Covantics North America LLC
Most cited
By later US patents
- Process for converting a metal carbide to carbon by etching in halogens566US 6,579,833 B1The Board of Trustees of the University of Illinois · 2003
- Method for removing a film on a silicon layer surface421US 5,022,961 ADainippon Screen Mfg.Co., Ltd. · 1991
- Treatment of etching chambers using activated cleaning gas291US 6,379,575 B1APPLIED Materials.Inc. · 2002
- Etching techniques166US 4,498,953 AAT&T Bell Laboratories · 1985
- Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmas123US 7,696,117 B2APPLIED Materials.Inc. · 2010