C01B 33/107
Halogenated silanes
C01B33/107 (Halogenated silanes) appears on 402 US grants and 443 published applications in this corpus.
Search patents in C01B- Granted patents
- 402
- Published applications
- 443
- Assignees
- 193
- Inventors
- 919
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 3 | 0 |
| 1977 | 3 | 0 |
| 1978 | 4 | 0 |
| 1979 | 5 | 0 |
| 1980 | 3 | 0 |
| 1981 | 6 | 0 |
| 1982 | 7 | 0 |
| 1983 | 9 | 0 |
| 1984 | 7 | 0 |
| 1985 | 8 | 0 |
| 1986 | 8 | 0 |
| 1987 | 7 | 0 |
| 1988 | 6 | 0 |
| 1989 | 8 | 0 |
| 1990 | 7 | 0 |
| 1991 | 9 | 0 |
| 1992 | 10 | 0 |
| 1993 | 6 | 0 |
| 1994 | 3 | 0 |
| 1995 | 3 | 0 |
| 1996 | 2 | 0 |
| 1997 | 2 | 0 |
| 1998 | 3 | 0 |
| 1999 | 7 | 0 |
| 2000 | 5 | 0 |
| 2001 | 0 | 2 |
| 2002 | 1 | 2 |
| 2003 | 1 | 2 |
| 2004 | 2 | 16 |
| 2005 | 4 | 3 |
| 2006 | 4 | 2 |
| 2007 | 2 | 10 |
| 2008 | 3 | 7 |
| 2009 | 3 | 35 |
| 2010 | 11 | 40 |
| 2011 | 13 | 42 |
| 2012 | 22 | 46 |
| 2013 | 21 | 42 |
| 2014 | 18 | 29 |
| 2015 | 25 | 14 |
| 2016 | 19 | 27 |
| 2017 | 23 | 16 |
| 2018 | 12 | 13 |
| 2019 | 14 | 13 |
| 2020 | 10 | 18 |
| 2021 | 10 | 10 |
| 2022 | 7 | 25 |
| 2023 | 11 | 6 |
| 2024 | 12 | 8 |
| 2025 | 9 | 11 |
| 2026 | 4 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- C01B 33/1071Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof207
- C01B 33/10778Purification86
- C01B 33/10773Halogenated silanes obtained by disproportionation and molecular rearrangement of halogenated silanes46
- C01B 33/10705Tetrafluoride27
- C01B 33/10768Tetrabromide4
Recent patents
- Method for purifying iodosilanes29 Sep 2026US 12,747,160 B2Entegris, Inc.
- Method for fabricating trihalodisilane and method for fabricating semiconductor device using the same4 Aug 2026US 12,698,212 B2Samsung Electronics Co., Ltd.
- Low temperature process for the safe conversion of the siemens process side-product mixture to chloromonosilanes14 Apr 2026US 12,600,638 B2Momentive Performance Materials Inc.
- Production system, production method and application of general-purpose high-purity chemicals3 Feb 2026US 12,539,471 B2Beijing University of Chemical Technology
- Method of preparing iodosilanes and compositions therefrom4 Nov 2025US 12,459,824 B2Entegris, Inc.
- Method for Producing Purified Trichlorosilane24 Sep 2026US 2026/0285694 A1Tokuyama Corporation
- Method for producing halotrisilane and method for manufacturing semiconductor devices using the same12 Mar 2026US 2026/0070792 A1Samsung Electronics Co., Ltd.
- Method for fluorine separation and recovery from phosphate rock enhanced with microbubble coupled silicon additive19 Feb 2026US 2026/0048997 A1Institute of Process Engineering, Chinese Academy of Sciences
- Method of preparing iodosilanes and compositions therefrom5 Feb 2026US 2026/0035252 A1Entegris, Inc.
- Fluorinated gas abatement and fluoride sequestration using silicon13 Nov 2025US 2025/0345747 A1International Business Machines Corporation
Most cited
By later US patents
- High purity silane and silicon production55US 4,676,967 AUnion Carbide Corporation · 1987
- Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds47US 5,051,117 AWacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH · 1991
- Chlorosilane and hydrogen reactor45US 5,906,799 AHemlock Semiconductor Corporation · 1999
- Trichlorosilane production process43US 4,526,769 AMotorola, Inc. · 1985
- Methods of using selective optical excitation in deposition processes and the detection of new compositions42US 4,637,938 AEnergy Conversion Devices, Inc. · 1987