Method for Producing Purified Trichlorosilane

Abstract

A method for producing purified trichlorosilane includes supplying crude trichlorosilane containing at least isopentane and methyldichlorosilane to a first distillation column, purifying the crude trichlorosilane by distillation in a manner that a low boiling point fraction having an isopentane concentration 150 times or more higher than an isopentane concentration in the crude trichlorosilane is discharged, and extracting trichlorosilane having a reduced isopentane concentration from a bottom of the column; and then supplying the obtained trichlorosilane having a reduced isopentane concentration to a second distillation column, purifying the obtained trichlorosilane having a reduced isopentane concentration by distillation in a manner that a high boiling point fraction having a methyldichlorosilane concentration 1.5 times or more higher than a methyldichlorosilane concentration in the crude trichlorosilane is discharged, and distilling off purified trichlorosilane having a reduced methyldichlorosilane concentration from a top of the column.

Dependencies are inferred from the claim text.