Method for purifying iodosilanes
AssigneeEntegris, Inc.
InventorsSungCheol Yoon, HyunHo Jung, JongWon Nam, Shane Nunes, Pei Zhao, Anthony D. Ozzello
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Abstract
Provided is a method for purification of iodosilanes, such as diiodosilane. In this method, trace amounts of certain metal ion contaminants are removed, thus providing certain liquid compositions comprising the iodosilanes, which can be used advantageously in the deposition of silicon-containing films onto microelectronic device substrates.
Claims14
A method of removing one or more metal(s) and/or metal ion(s) from a liquid composition, said liquid composition comprising an iodo-substituted silane chosen from monoiodosilane, diiodosilane, triiodosilane, tetraiodosilane, monoiododisilane, diiododisilane, triiododisilane, tetraiododisilane, pentaiododisilane, and hexaiododisilane, the method comprising:
- contacting a filter material with the liquid composition comprising the iodo-substituted silane having one or more metals and/or metal ions as solubilized impurities, the filter material comprising at least one hydrophilic functional group chosen from acidic, basic and ionic groups;
- thereby reducing the amount of the one or more metals or metal ions in the liquid composition;
- wherein the filtered liquid composition with reduced metal ions demonstrates improved stability over time compared with an unfiltered control, and wherein the filtered liquid composition is greater than 99.5% pure after 12 weeks at 60 °C, while the unfiltered control is less than 95% pure after 12 weeks at 60 °C.
A method of purifying an iodo-substituted silane solution comprising:
- repeatedly contacting a filter material comprising a hydrophilic functional group with the iodo-substituted silane solution, such that solubilized metal ions in the iodo-substituted silane solution are reduced;
- wherein the iodo-substituted silane solution with reduced metal ions demonstrates improved stability over time compared with an unfiltered control, and wherein the filtered iodo-substituted silane solution with reduced metal ions is greater than 99.5% pure after 12 weeks at 60 °C while the unfiltered control is less than 95% pure after 12 weeks at 60 °C.
A method of enhancing the stability of iodo-substituted silane solutions comprising:
- removing metal ions from the iodo-substituted silane solution by contacting the solution with a filter material, the filter material comprising at least one hydrophilic functional group chosen from acidic, basic and ionic groups;
- thereby reducing the amount of the one or more metals or metal ions in the solution,
- wherein the iodo-substituted silane solution includes one or more of monoiodosilane, diiodosilane, triiodosilane, tetraiodosilane, diiododisilane, triiododisilane, tetraiododisilane, pentaiododisilane, and hexaiododisilane;
- and
- wherein a filtered solution with reduced metal ions demonstrates improved stability over time compared with an unfiltered control, wherein the filtered solution is greater than 99.5% pure after 12 weeks at 60 °C, while the unfiltered control is less than 95% pure after 12 weeks at 60 °C.
Dependencies are inferred from the claim text.