Back to results
US 5,906,799 AGranted
Chlorosilane and hydrogen reactor
AssigneeHemlock Semiconductor Corporation
InventorsRichard Anthony Burgie, Eric Michael Fleming
Life of this patent
Estimating the term…
Abstract
The present invention is a reactor for the hydrogenation of chlorosilanes at temperatures above about 600.degree. C. The reactor comprises one or more of the following improvements: (1) a reaction chamber formed from a silicon carbide coated carbon fiber composite, (2) a heating element formed from a silicon carbide coated carbon fiber composite, and (3) one or more silicon nitride insulators electrically insulating the heating element.
Claims21
A reactor comprising:
- a reaction vessel defining a chamber for contacting chlorosilane and hydrogen gases at temperatures greater than about 600.degree. C., where the reaction vessel is formed from a silicon carbide coated carbon fiber composite.
A reactor comprising:
- a reaction vessel defining a chamber for contacting chlorosilane and hydrogen gases at temperatures greater than about 600.degree. C., where the reaction vessel is heated by heating element formed from a silicon carbide coated carbon fiber composite.
A reactor comprising:
- a reaction vessel defining a chamber for contacting chlorosilane and hydrogen gases at temperatures greater than about 600.degree. C. and a heating element, wherein the reaction vessel and the heating element are formed from a silicon carbide coated carbon fiber composite.
A reactor comprising:
- a reaction vessel defining a chamber for contacting chlorosilane and hydrogen gases at temperatures greater than about 600.degree. C., a heating element, and a silicon nitride insulator electrically insulating the heating element.
A reactor comprising:
- a reaction vessel defining a chamber for contacting chlorosilane and hydrogen gases at temperatures greater than about 600.degree. C. and a heating element, where the reaction vessel and the heating element are formed from a silicon carbide coated carbon fiber composite, and the heating element is electrically insulated by a silicon nitride insulator.
Dependencies are inferred from the claim text.